Scanning Mirrors
Tydex offers scanning mirrors of custom-made shape to achieve high stable reflective parameters in the limited range of AOI. In a system a couple of mirrors can be utilized that allows deviating incident beam into two flats. So called X-mirrors and Y-mirrors are emphasized.
Specification:
Substrate material:
KU-1, Si
Surface figure @ 633nm:
l/10
Surface quality, scr/dig:
40/20
Clear aperture:
exceeds central 85% of dimension
Dimensional tolerance, mm:
± 0.25
Thickness tolerance, mm:
± 0.25
Wedge, arc.min
<=5
Range of scanning angels:
user specified
Coating:
dielectric, metal-dielectric, metallic; user specified
Damage threshold, J/cm2:
2-5, depending on coating spec.
No.
Title
Overall dimensions, mm
Thickness C, mm
Range of AOI, arc. deg
A
B
1
X-mirror
18
11.5
1.5
45
2
Y-mirror
22
15.5
1.5
45
3
mirror
65
55
10
30-45
4
mirror
75
40
10
30-45
5
mirror
80
30
10
30-45
Here is an example of the scanning mirror coating:
Fig. 1 Si scanning mirror, HR (R>99%) @1064 nm and (R>90%) @633 nm AOI=45°.