XLS-1 series
Compact and precise linear piezo stage
The XLS-1 series are precise linear stages driven by an ultrasonic piezo motor. These stages combine high-speed positioning with nanometre precision. Xeryon’s ultrasonic piezo motor ensures you a long lifetime, noiseless and vibration-free operation. In addition, the self-locking piezo motor holds the position of the stage when powered off. The reduced heat dissipation leads to a very stable nano-positioning system. The XLS-1 is used in metrology applications, e.g. for part alignment or sample manipulation. The XLS-1 series is available in different lengths and are easily stacked into an XY-assembly. All stages can be equipped with a short cage to increase the stroke.
Key features
drive principle
patented Crossfixx™ ultrasonic piezo technology
bearings
precision crossed-roller
lifetime distance
> 100 km
control principle
closed-loop or open-loop position control
operating voltage
20 to 48 V
Model code structure
stage type
stage length (mm)
encoder resolution (nm)
optional
vacuum compatibility (10-6 mbar)
short cage for increased stroke
XLS-1
-30
-OPEN
-HV
-SC
-1250
-312
-78
-5
-1
-40
same as for XLS-1-30
-50
-60
-70
-80
-100
-120
Environmental compatibility
temperature range
-30°C to +70°C
humidity range
20% to 90% RH (non-condensing)
heat dissipation (motor only)
< 1 W
mounting surface flatness
< flatness specification of stage
Motion performance
XLS-1 all lengths
unit
tole- rance
resolution
-OPEN
-1250
-312
-78
-5
-1
ENCODER
type
NA1
inductive, incremental
optical, incremental
grating period
NA1
1280
20
µm
resolution
NA1
1250
312
78
5
1
nm
index
NA1
1 per full stroke
accuracy
NA1
± 10
± 5
± 1
µm
typ.
STAGE
positioning
resolution
= min. step size
= min. incremental motion (MIM)
500002
1250
350
80
25
nm
typ.
unidirectional repeatability
± 500002
± 1250
± 350
± 80
± 25
nm
typ.
bidirectional repeatability
± 500002
± 2500
± 700
± 160
± 50
nm
typ.
speed
max. speed
1000
200
150
25
mm/s
typ.
min. speed
50003
5
2
1
µm/s
typ.
stability (at typical speed of 10 mm/s)
± 10
± 1
%
typ.
point-to-point positioning 0 g load
time for a 1 mm step4 100 g load
NA
300
500
500
800
msec msec
typ.
1 a closed-loop control can be achieved by connecting an external position encoder to the controller
2 when using stage in burst mode (50µm bursts)
3 lower average speeds can be achieved when using burst mode
4 settling within bidirectional repeatability range
Note: a detailed description of the technical terms used in this datasheet can be found on the Terminology page of our website.
Mechanical properties
XLS-1
-30
XLS-1
-40
XLS-1
-50
XLS-1
-60
XLS-1
-70
XLS-1
-80
XLS-1
-100
XLS-1
-120
unit
tole- rance
dimensions
length
30
40
50
60
70
80
100
120
mm
± 0.1
width
34
height
13
stroke/ standard cage travel range short cage (-SC)
10
19
25
30
30
38
40
48
45
52
50
69
75
85
100
109
mm
± 0.1
mass (w/o connector)
40
50
63
76
88
105
126
151
g
± 5%
load capacity (payload limitation)
0.5
kg
max.
load capacity* (bearing force limitation)
vertical lateral
237
237
396
396
475
475
633
633
712
712
792
792
990
990
1188
1188
N
max.
tilt around pitch axis tilt around yaw axis tilt around roll axis
1.13
1.13
3.02
1.50
1.50
5.05
1.88
1.88
6.06
2.25
2.25
8.07
2.63
2.63
9.08
3.00
3.00
10.10
3.75
3.75
12.62
4.50
4.50
15.15
Nm
holding force
1
N
min.
driving force
1
N
min.
slider/base
stage material
bearings
anodised aluminium stainless steel
cable length**
1.5
m
± 0.1
connector (stage to controller)
1x 15-pin D-sub HD male (standard) 1x 15-pin D-sub female (-HV)
* valid for stages with standard cage
** extension cables available or shorter cable on request
Error motion
XLS-1
length 30 to 70
XLS-1
length 80 to 120
unit
tolerance
resolution
-open
-1250
-312
-78
-5
-1
-open
-1250
-312
-78
-5
-1
error motion
straightness
± 5
± 1
± 10
± 2
µm
max.
flatness
± 5
± 1
± 10
± 2
µm
max.
pitch
120
25
24
5
120
25
24
5
µrad arcsec
max.
roll
120
25
24
5
120
25
24
5
µrad arcsec
max.
yaw
60
12.5
12
2.5
60
12.5
12
2.5
µrad arcsec
max.
Controller/software
The XLS-1 series linear stages are compatible with all Xeryon controllers. Controlling of the stage is done with:
· easy-to-use Windows interface
· LabVIEW interface program (compiled program or source)
· MATLAB interface script
· C++ and Python libraries