XRT-U series
Compact rotation stage with a small error motion
The XRT-U is a compact and precise rotation stage driven by an ultrasonic piezo motor. Xeryon’s ultrasonic piezo motor ensures you high speeds, long lifetime and noiseless operation. This makes the XRT-U a state-of-the-art rotary stage for a broad range of precision positioning applications or metrology applications such as micro-CT, optical microscopy, electron microscopy (vacuum and non-magnetic). The precision ball bearings allow you to achieve error motion values close to air bearing stages, but in a smaller volume and at a lower cost. The XRT-U is available in two sizes and with different options. Stacking onto a Xeryon linear stage is easily done with available interface plates.
Key features
drive principle
patented Crossfixx™ ultrasonic piezo technology
bearings
precision ball bearings
lifetime
> 1 million rev.
control principle
closed-loop position control
operating voltage
20 to 48 V
Model code structure
stage type
approx. rotor diameter (mm)
encoder resolution (µrad)
optional
vacuum compatibility (10-6 mbar)
non-magnetic materials*
XRT-U
-30
-109
-HV
-NM
-40
-73
-3
* full ceramic bearings, copper alloy rotor and stainless steel bolts (A2/A4)
Environmental compatibility
temperature range
-30°C to +70°C
humidity range
20% to 90% RH (non-condensing)
heat dissipation (motor only)
< 1 W
mounting surface flatness
< 5 µm
Motion performance
XRT-U-30-109
XRT-U-40-73
XRT-U-40-3
unit
tolerance
ENCODER
type
optical, incremental
counts per rev.
57600
86400
1800000
109
73
3.49
µrad
resolution
22.5
15
0.72
arcsec
6250
4167
200
µº
index
1 per rev.
accuracy
± 0.017
± 0.013
%
typ.
STAGE
positioning
resolution
= min. step size
= min. incremental motion (MIM)
125
25
7100
75
15
4300
25
5
1400
µrad arcsec
µº
typ.
± 125
± 75
± 25
µrad
unidirectional repeatability
± 25
± 15
± 5
arcsec
typ.
± 7100
± 4300
± 1400
µº
± 250
± 150
± 50
µrad
bidirectional repeatability
± 50
± 30
± 10
arcsec
typ.
± 14200
± 8600
± 2800
µº
speed
max. speed
720
540
º/s
typ.
min. speed
0.008
0.006
º/s
typ.
stability
1
%
typ.
point-to-point positioning time
0 kgmm2 inertia
10 kgmm2 inertia
300
500
msec msec
typ.
error motion (p-p)
radial at 7 mm above top surface
1
µm
max.
axial in centre
0.5
µm
max.
tilt (wobble)
50
µrad
max.
* for a 1° step and settling within bidirectional repeatability range
Note: a detailed description of the technical terms used in this datasheet can be found on the Terminology page of our website.
Mechanical properties
XRT-U-30-109
XRT-U-40-73
XRT-U-40-3
unit
tolerance
dimensions
40 x 35 x 21
50 x 46 x 21
mm
± 0.1
rotor diameter
32
43
mm
± 0.1
aperture
7
12.7
7
mm
± 0.1
mass (w/o connector)
82
130
g
± 5%
load capacity (payload limitation)
inertia mass*
100
0.5
200
1
kgmm2 kg
max.
load capacity
(bearing force limitation)
axial radial tilt
25
25
0.15
35
35
0.2
N N
Nm
max.
holding torque
7
10
mNm
min.
driving torque
14
20
mNm
min.
stage material
rotor housing
stainless steel AISI316 or copper alloy (-NM)
anodised aluminium
cable length**
1.5
m
± 0.1
connector (stage to controller)
1x 15-pin D-sub HD male
* assuming a solid cylindrical payload of dia. 40 mm
** extension cables available or shorter cable on request
Controller/software
The XRT-U series rotation stages are compatible with all Xeryon controllers. Controlling of the stage is done with:
· easy-to-use Windows interface
· LabVIEW interface program (compiled program or source)
· MATLAB interface script
· C++ and Python libraries
Drawings
Measurement data