M-971 Motorized OEM XY Stage
Low Price with High Quantities
- XY stage for the price-sensitive applications
- Precise stepper motors
- Crossed roller guides
- Limit and reference point switches (Hall effect)
XY stage for the price-sensitive OEM market
The M-971 is integrated into systems for inspection, lithography, or biomedical engineering and is optimized for optical microscopy. It was specially developed to meet the requirements of price-sensitive OEM markets. Proven and cost-optimized components form its basis:
The design of the guides which includes several short crossed roller guides distributes the load evenly over a large surface and ensures high stiffness and good travel accuracy.
The drivetrain is based on a widely used linear stage from PI. Its reliability and long lifetime have been proven in use for years.
By using stepper motors, encoders can be dispensed with and a simple stepper motor controller can be used. The XY stage is equipped with limit and reference switches to ensure fast and precise referencing and safety during operation.
Specifications
Motion and positioning
Unit
Tolerance
M-971.01
Active axes
X, Y
Travel range in X
mm
50
Travel range in Y
mm
25
System resolution in X
nm
2.5
System resolution in Y
nm
2.5
Minimum incremental motion in X
µm
typ.
0.2
Minimum incremental motion in Y
µm
typ.
0.2
Unidirectional repeatability in X
µm
typ.
1
Unidirectional repeatability in Y
µm
typ.
1
Backlash in X
µm
typ.
6
Backlash in Y
µm
typ.
6
Velocity in X
mm/s
max.
10
Velocity in Y
mm/s
max.
10
Reference switch
Hall effect
Reference switch repeatability
µm
typ.
1
Limit switch
Hall effect
Rotational crosstalk in θY with motion in X
µrad
typ.
±50
Rotational crosstalk in θZ with motion in X
µrad
typ.
±50
Rotational crosstalk in θX with motion in Y
µrad
typ.
±50
Rotational crosstalk in θZ with motion in Y
µrad
typ.
±50
Mechanical properties
Unit
Tolerance
M-971.01
Drive screw type
Leadscrew
Drive screw pitch
mm
1
Guide type
Crossed roller guide
Drive force in X
N
50
Drive force in Y
N
50
Holding force in X, passive
N
200
Holding force in Y, passive
N
200
Load capacity
N
200
Overall mass
g
±5 %
8460
Drive properties
Unit
Tolerance
M-971.01
Motor type
Stepper motor
Nominal current, RMS
A
max.
1.2
Resistance
Ω
2.6
Inductance
mH
1.9
Motor resolution
Full steps/rev.
400
Miscellaneous
Unit
Tolerance
M-971.01
Material
Aluminum, black anodized
Connector
2 × D-sub 15-pin (m)
Recommended controllers/drivers
C-663.11
C-663.12
M-971.01 新产品!
OEM-XY stage, 50 mm × 25 mm travel range, stepper motor, Hall effect limit switches
商品属性 [主动轴] X, Y [行程] 50mm in X 25mm in Y