Q-845 Q-Motion® SpaceFAB High Precision and High Stiffness
• Six Degrees of Freedom • ±7 mm travel range in X and Y, and ±5 mm in Z • ±7° rotation range in θX, θY, and ±8° in θZ
• 10 N load capacity, center mounted • Self-locking, no heat generation at rest • Vacuum-compatible to 10-6 hPa
Piezoelectric inertia drive
Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special drive electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. The operating frequency of up to 20 kHz enables directly driven runners to achieve velocities of more than 5 mm/s.
Crossed roller bearings
With crossed roller bearings, the point contact of the balls in ball bearings is replaced by a line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller bearings are also distinguished by high guiding accuracy and load capacity. Forced guiding of the rolling body cages prevents the roller bearings from creeping.
Fields of application
Industry and research. Measuring technology, microscopy, micromanipulation, biotechnology, and automation.
specifications
Q-845.140 Unit Tolerance Motion and positioning
Active axes
X, Y, Z, θX, θY, θZ
Integrated sensor
Incremental linear encoder
Travel range in X, Y
±7
mm
Travel range in Z
±5
mm
Rotation range in θX, θY
±7
°
Rotation range in θZ
±8
°
Sensor resolution
1
nm
Minimum incremental motion in X, Y
6
nm
typ.
Minimum incremental motion in Z
20
nm
typ.
Minimum incremental motion in θX, θY, θZ
0.9
µrad
typ.
Unidirectional repeatability in X, Y
±30
nm
typ.
Unidirectional repeatability in Z
±35
nm
typ.
Unidirectional repeatability in θX
±20
µrad
typ.
Unidirectional repeatability in θY
±10
µrad
typ.
Unidirectional repeatability in θZ
±6
µrad
typ.
Backlash in X, Y
40
nm
typ.
Backlash in Z
60
nm
typ.
Backlash in θX, θY
35
µrad
typ.
Backlash in θZ
20
µrad
typ.
Max. velocity in X, Y, Z
5
mm/s
max.
Max. angular velocity in θX, θY, θZ
50
mrad/s
max.
Mechanical properties
Stiffness in X, Y
1
N/µm
Stiffness in Z
2
N/µm
Load capacity in X, Y
0.5
N
max.
Load capacity in Z (base plate horizontal)
10
N
max.
Permissible torque in θX, θY, θZ
5
N·m
max.
Drive type
Piezoelectric inertia drive
Miscellaneous
Connection
6x Sub-D 15 (m)
Material
Stainless steel, aluminum
Mass
1.9
kg
±5 %
Mass without cable and connector
1.2
kg
±5 %
Cable length
2
m
±10 mm
The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis in this table shows its maximum travel range,
where all other axes and the pivot point are at the reference position.
Ordering information
Q-845.140
Q-Motion® SpaceFAB, Piezoelectric Inertia Drive, ±7 mm Travel Range in X und Y, ±5 mm Travel Range in Z, ±7° Rotation Range in θx, θy, ±8°
Rotation Range in θz, 10 N Load Capacity, Vacuum-Compatible to 10-6 hPa
商品属性 [主动轴] X, Y, Z, θX, θY, θZ [集成传感器] Incremental linear encoder [刚性] X,Y: 1N/µmZ:2 N/µm [负载] X,Y: 0.5NZ:10 N [电机类型] Piezoelectric inertia drive [分辨率] 1nm [最小位移] X,Y: 6nm ;Z:20nm; θX, θY, θZ: 0.9µrad