UPR-120 Ultraprecision Rotation Stage Excellent Stability and Travel Accuracy
• Unlimited travel range • Velocity to 360 °/s • Incremental angle measuring system with 0.00002° resolution
• Clear aperture with 35 mm diameter • Optional: Air bearings for optimized flatness
Reference-class rotation stage
High travel accuracy. High position resolution due to incremental encoder with analog signal transmission (sin/cos, 1 Vpp)
Magnetic direct drive
Ironless magnetic direct drive (torque motor) for high velocity and acceleration. High position resolution.
Fields of application
Industry and research. Metrology, semiconductor manufacturing and testing, synchrotron applications
specifications
6808911130
UPR-12068624911130
UPR-120 AIRUnit Tolerance Motion and Positioning
Active axes
θZ
θZ
Travel range
>360
>360
°
Integrated sensor
Incremental angle measuring system
Incremental angle measuring system
Sensor resolution*
0.00002
0.00002
°
Min. incremental motion
0.00008
0.00004
°
typ.
Unidirectional repeatability
0.00008
0.00005
°
typ.
Bidirectional repeatability
±0.0001
±0.00008
°
typ.
Flatness
±1
±0.05
µm
typ.
Eccentricity
±3
±0.1
µm
typ.
Wobble
±25
±1.25
µrad
typ.
Velocity
360
360
°/s
max.
Mechanical Properties
Max. load, axial
100
100
N
max.
Max. load, radial
50
50
N
max.
Moved mass
0.8
1.1
kg
Overall mass
6
6.5
kg
Drive Properties
Drive type
Torque motor, ironless
Torque motor, ironless
Intermediate circuit voltage
48
48
VDC
max.
Peak torque
2.08
2.08
Nm
typ.
Nominal torque
0.76
0.76
Nm
typ.
Nominal current, effective
7.7
7.7
A
typ.
Torque constant, effective
0.26
0.26
Nm/A
typ.
Resistance per phase
2.2
2.2
Ω
typ.
Inductivity per phase
1.17
1.17
mH
typ.
Back EMF phase-phase
0.18
0.18
Vs/rad
max.
Limit switches
optical
optical
Miscellaneous
Operating temperature range
10 to 50
10 to 50
°C
Humidity
20 – 90% rel., not condensing
20 – 90% rel., not condensing
Material
Aluminum, (black anodized)
Aluminum, (black anodized)
Recommended controller
SMC Hydra, ACS SPii+EC and other industrial solutions
SMC Hydra, ACS SPii+EC and other industrial solutions
* With SMC Hydra controller.
Ordering Information 6808911130
UPR-120 Ultra Precision Rotation Stage, Torque Motor, High-Resolution Angle Measuring System with Sin/Cos Signal Transmission,
Optical Limit Switch
6824911130
UPR-120 AIR Ultra Precision Rotation Stage, Torque Motor, Air Bearing, High-Resolution Angle Measuring System with Sin/Cos Signal
Transmission, Optical
商品属性 [主动轴] θZ [行程] >360° [集成传感器] Incremental angle measuring system [负载] 100N(轴向) [工作温度] 10~50℃ [最小位移] 0.00008°/ 0.00004° [电机类型] Torque motor, ironless