FQCW 266-200
Diode Pumped Continuous Wave Solid State Laser
266 nm
Continuous Wave
Single Frequency
Low Noise
TEM00
Up to 200 mW
Conduction Cooling
holography • inspection • analytics • lithography
Optical Data
Model
FQCW 266-200
Nominal Output Power
200 mW
Output Power Adjustability
20 - 220 mW
Wavelength
266 nm
Linewidth
< 300 kHz
Coherence Length
> 1000 m
Beam Quality Factor M2
< 1.3
Polarization
vertical, > 100:1
Beam Diameter
0.55 mm 20 %
Beam Divergence (full angle)
< 0.8 mrad
Beam Pointing Stability 1)
< 3μ rad / K
Static Alignment Tolerance 4)
Position < 0.25 mm, Angle < 2.5 mrad
Power Stability 1) (8 h, 1 s average)
< 1 % rms
Noise (100 kHz - 10 MHz)
< 0.5 % rms
Electrical Data
Line Voltage
90 V - 250 V AC
Power Consumption Mean (Max)
100 W (200 W)
Communication Interface
USB / RS 232
Safety Equipment
key switch, interlock
Miscellaneous
Dimensions (control unit)
363 x 325 x 115 mm
Weight (control unit)
5.3 kg
Dimensions (laser head)
379(+50)5) x 270 x 91 mm
Weight (laser head)
17 kg
Operating Temperature
20 ℃to 35℃ non-condensing
Warm-up Time (cold start)
< 15 minutes
Options
Purge Interface for Exit Window
CDA 0.5LPM, ~2%rH, particle filter 0.01µm
Notes
1. After 30 minutes warm-up in the temperature range 20 - 35 ℃, temperature change < 1 C/hour.
2. The exit window must be equipped optionally with a purge interface in case of external photo contamination.
3. This laser system is equipped with the Automatic Crystal Shifter (ACS).
4. Position and angle of static alignment tolerances are specified with regard to laser beam exit.
5. Length of laser head is +50mm expanding by using purge interface.
商品属性 [波长] 266nm [功率] 200mW