The EX10A is a high power mini excimer laser
EX10A MINI LASER
PARAMETER
F2
ArF
KrF
XeCl
XeF
Wavelength nm
157
193
248
308
351
Energy Max. mJ
2.5
18
24
15
10
Average Power 500Hz
0.8
7
10
4
4
Average Power 1000HZ
14
18
8
8
Repetition Rate Hz
500/1000
Dynamic gas lifetime to 50% energy
1E6
15E6
20E6
20E6
15E6
Static Gas Life to 50% energy
5
30 days
60 days
60 Days
30 days
Pulse Length ns
8-12
Beam Size , mm
6 X 3
Divergence mRad full angle
1 X 2
Stability
<3% Standard Deviation
Optics Service
1 Billion
Timing Jitter
2nS Standard Deviation
Tube Service
25-3,5 Billionpulses
Cooling
Air
AC INPUT
115/220 VAC 4/8A
Weight
20kg
DIMENSIONS
61 X 20 X 20
商品属性 [波长] 157/193/248/308/351nm [功率] 500/1000Hz [脉宽] 8-12ns