EX50IN INDUSTRIAL LASER
SPECIFICATIONS
PARAMETER
F2
ArF
KrF
XeCl
XeF
Wavelength nm
157
193
248
308
351
Energy Max. mJ
2.5
35
50
20
20
Average Power @250Hz
0.5
5
10
5
5
Average Power @500Hz
1
10
20
9
9
Average Power @750Hz
1.5
15
28
12
12
Repetition Rate, Hz
250/500/750
Dynamic gas lifetime to 50% energy
10E6
20E6
30E6
15E6
150E6
Shelf life Approx. to 50% energy
15 days
90 days
120 days
180 days
120 Days
Pulse Length, ns
10
15-20
Beam Size, mm
9 X 4
Stability
<2% Standard Deviation
Tube Service
3 Billion Pulses
Divergence, mRad full angle
2 X 1
Cooling
Air/Water
Window Service
500E6
500E6
>1 billion
200E6
300E6
商品属性 [波长] 157/193/248/308/351nm [脉宽] 10ns/15-20ns [重复频率] 250/500/750Hz