Nano-MZ
Features
Compact piezo nanopositioner
Low profile: 0.76"
Closed loop control
Custom travel ranges available
Typical Applications
High resolution Z-axis alignment
AFM
Metrology
Product DescriptionThe Nano-MZ is a compact Z-axis piezo nanopositioning system designed to be easily integrated into existing instrumentation where space is restricted. Internal position sensors utilizing proprietary PicoQ®technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. A related model, the Nano-M3Z, includes additional “tip” and “tilt” motions (θX ,θY) to the linear motion in the Z-axis. The Nano-MZ can be customized for longer ranges of motion (up to 100 microns) and a center aperture can also be incorporated for transmission of light..
Technical Specifications
Range of motion (Z)
25 μm
Resolution
0.05 nm
Resonant Frequency
1300 Hz ±20%
Stiffness
1.0 N/μm
Recommended max. load (horizontal)*
0.5 kg
Body Material
Aluminum
Controller
Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.
Nano-MZ Drawing
商品属性 [行程] 25 μm [刚性] 1.0 N/μm [负载] 0.5 kg [分辨率] 0.05 nm