Nano-HS3M
Features
High speed 3 axis piezo nanopositioner
Low noise floor
Closed loop control
Picometer positioning resolution
High stability
Compact design
Typical Applications
High speed, high resolution positioning
Metrology
AFM
SPM
Product Description
The Nano-HS3M is a high speed, XYZ precision piezo nanopositioning system with picometer positioning resolution. Offering maximum versatility, the Nano- HS3M is designed for demanding metrology applications. Internal position sensors utilizing proprietary PicoQ®technology provide absolute, repeatable position measurement under closed loop control. The compact footprint, ultra-low noise characteristics, and a Z-axis resonant frequency of 13.5kHz make it ideal for metrology applications that require picometer noise floors and high speed performance.
Technical Specifications
Range of motion (XY)
10 μm
Range of motion (Z)
5 μm
Resolution
0.01 nm
Resonant Frequency (X)
1.6 kHz
Resonant Frequency (Y)
1.5 kHz
Resonant Frequency (Z)
13.5 kHz
Recommended max. load (horizontal)*
0.1 kg
Recommended max. load (vertical)*
0.1 kg
Body Material
Aluminum or Titanium
Controller
Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.
Position Noise Spectrum
The Nano-HS3M demonstrates less than 2 picometers of position noise on all three axes. Click below to enlarge and view the data for each axis.
X-Axis
Y-Axis
Z-Axis
Nano-HS3M Drawing
商品属性 [行程] (XY)10 μm (Z)5 μm [负载] 0.1 kg [分辨率] 0.01 nm