Nano-M3Z
Features
Compact piezo nanopositioner
Three axis motion (Z θX θY)
Low profile: 0.76"
Closed loop control
Typical Applications
Z-axis plus tip/tilt alignment
Nanolithography
Metrology
Nano-alignment
Product DescriptionThe Nano-M3Z is a compact, three axis (Z, θX , θY) piezo nanopositioning system constructed from Aluminum. The compact design of the Nano-M3Z allows it to be integrated into existing instrumentation where space is restricted. The Nano-M3Z is ideal for demanding applications which require precise alignment capabilities. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control. A related model, the Nano-Man5, incorporates linear X and Y motion to the capabilities of the Nano-M3Z.
Technical Specifications
Range of motion (Z)
25 μm
Range of motion (θX)
1 mradian
Range of motion (θY)
1 mradian
Resolution (Z)
0.05 nm
Resolution (θX)
2 nradian
Resolution (θY)
2 nradian
Resonant Frequency
500 Hz ±20%
Stiffness
1.0 N/μm
Recommended max. load (horizontal)*
0.5 kg
Recommended max. load (vertical)*
0.2 kg
Body Material
Aluminum
Controller
Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.
Nano-M3Z Drawing
商品属性 [行程] (Z)25 μm (θX) 1 mradian (θY)1 mradian [刚性] 1.0 N/μm [负载] 0.5 kg [分辨率] (Z)0.05 nm (θX) 2 nradian (θY)2 nradian