Nano-UHV50
Features
UHV compatible piezo nanopositioner
Two axis (XY)
50 μm x 50 μm ranges of motion
Bakeable to 100° C
Titanium or invar construction
Closed loop PicoQ® control
Typical Applications
X-ray, VUV, and optical microscopy
Surface metrology
UHV atomic scale microscopy
Special designs - just contact us with your requirements
Product Description
The Nano-UHV50 is a two axis UHV compatible piezo nanopositioning system constructed from titanium or invar. Made entirely from UHV compatible materials, the Nano-UHV50 is bakeable to 100°C for vacuum applications in the 10-10 Torr range. A 1 inch (25mm) center aperture provides an optical pathway or access for sample holders. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer accuracy. Cable lengths and connectors are customized for the actual installation. Connector wiring is compatible with Accu-Glass Products electrical feedthrough flanges - compatibility with other types of flanges may be requested.
Note: Customized UHV stages are always welcome - just email or call to discuss your special requirements.
Technical Specifications
Range of motion (X)
50 μm
Range of motion (Y)
50 μm
Resolution (XY)
0.1 nm
Resonant Frequency (X)
500 Hz ±20%
Resonant Frequency (Y)
250 Hz ±20%
Stiffness
0.5 N/μm
θ roll, θ pitch (typical)
≤1 μrad
θ yaw (typical)
≤3 μrad
Recommended max. load (horizontal)*
0.5 kg
Recommended max. load (vertical)*
0.2 kg
Body Material
Invar or Titanium
Controller
Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.
Nano-UHV50 Drawing
商品属性 [行程] (X)50 μm (Y)50 μm [刚性] 0.5 N/μm [负载] 0.5 kg [分辨率] (XY)0.1 nm