XLS-3 series
Precise linear piezo stage with high force output
The XLS-3 series are precise linear stages driven by an ultrasonic piezo motor. These stages combine high-speed positioning with nanometre precision and generate a high force output within a small volume. Xeryon’s ultrasonic piezo motor ensures you a long lifetime, noiseless and vibration-free operation. In addition, the self-locking piezo motor holds the position of the stage when powered off. The reduced heat dissipation leads to a very stable nano-positioning system. The XLS-3 is used in metrology applications, e.g. for part alignment or sample manipulation. The XLS-3 series is available in different lengths and are easily stacked into an XY- or XYZ-assembly.
Key features
drive principle
patented Crossfixx™ ultrasonic piezo technology
bearings
precision crossed-roller
lifetime distance
> 100 km
control principle
closed-loop or open-loop position control
operating voltage
20 to 48 V
Model code structure
stage type
stage length (mm)
encoder resolution (nm)
optional
vacuum compatibility (10-6 mbar)
short cage for increased stroke
XLS-3
-40
-OPEN
-HV
-SC
-1250
-312
-78
-5
-1
-50
same as for XLS-3-40
-60
-70
-80
-100
-120
Environmental compatibility
temperature range
-30°C to +70°C
humidity range
20% to 90% RH (non-condensing)
heat dissipation (motor only)
< 1 W
mounting surface flatness
< flatness specification of stage
Error motion
XLS-3
length 40 to 70
XLS-3
length 80 to 120
unit
tolerance
resolution
-1250
-312
-78
-5
-1
-1250
-312
-78
-5
-1
error motion
straightness
± 5
± 1
± 10
± 2
µm
max.
flatness
± 5
± 1
± 10
± 2
µm
max.
pitch
120
25
24
5
120
25
24
5
µrad arcsec
max.
roll
120
25
24
5
120
25
24
5
µrad arcsec
max.
yaw
60
12.5
12
2.5
60
12.5
12
2.5
µrad arcsec
max.
Controller/software
The XLS-3 series linear stages are compatible with all Xeryon controllers. Controlling of the stage is done with:
· easy-to-use Windows interface
· LabVIEW interface program (compiled program or source)
· MATLAB interface script
· C++ and Python libraries
Drawings
Note: stages XLS-3-50, XLS-3-60, XLS-3-70, XLS-3-100 and XLS-3-120 have similar mounting holes as shown in the drawings above.