LRQ-V2 Series: High vacuum motorized linear stages
Vacuum compatible to 10-6 Torr
75, 150, 300, 450, 600 mm travel
Up to 205 mm/s speed and up to 100 N thrust
100 kg load capacity
Only 7 feedthrough wires required to control these units
Designed for use with a X-MCB1 Series stepper motor controller or any 2-phase stepper motor controller
For more information about the basics of a vacuum system and considerations to keep in mind when gathering requirements for your application, read our technical article, "Motion Device Design Considerations for Vacuum Applications".
Zaber's LRQ-V2 Series devices are high-vacuum, computer-controlled, motorized linear stages with high stiffness, load, and lifetime capabilities in a compact size
At only 36 mm high, these vacuum stages are excellent for applications where a low profile is required. The LRQ-V2's innovative design allows speeds up to 205 mm/s and loads up to 100 kg. Like all of Zaber's products, the LRQ-V2 Series is designed to be very easy to set up and operate. These stages can bolt together into an XY system.
These stages are wired with a male D-sub 15 connector for plug-and-play use with our X-MCB1 Series stepper motor controllers. Simply cut the connector off for flying leads in vacuum and match the wire connections outside of the vacuum for an easy connection. Our handy kits include free software, and all of the accessories that you will need to get the stage running right out of the box.
Part Numbering Scheme
Specification Value Alternate Unit Built-in Controller
No
Recommended Controller
X-MCB1 (48 V) Recommended
Repeatability
< 2.5 µm
< 0.000098 "
Maximum Centered Load
1000 N
224.3 lb
Maximum Cantilever Load
3000 N⋅cm
4248.4 oz⋅in
Guide Type
Recirculating Ball Linear Guide
Stiffness in Pitch
640 N⋅m/°
27 µrad/N⋅m
Stiffness in Roll
1850 N⋅m/°
9 µrad/N⋅m
Stiffness in Yaw
665 N⋅m/°
26 µrad/N⋅m
Motor Steps Per Rev
200
Motor Type
Stepper (2 phase)
Motor Rated Current
2100 mA/phase
Inductance
2.8 mH/phase
Motor Connection
Teflon flying leads with D-sub15 connector
Default Resolution
1/64 of a step
Mechanical Drive System
Precision lead screw
Limit or Home Sensing
Magnetic home sensor
Manual Control
No
Axes of Motion
1
Mounting Interface
M6 and M3 threaded holes
Operating Temperature Range
0 to 50 °C
Vacuum Compatible
High vacuum (10-6 Torr)
RoHS Compliant
Yes
CE Compliant
Yes
Comparison - LRQ-V2 Series
Part Number Microstep Size (Default Resolution) Travel Range Accuracy (unidirectional) Backlash LRQ075AL-V2T4
0.09921875 µm
75 mm (2.953 ")
23 µm (0.000906 ")
< 8 µm (< 0.000315 ")
LRQ075BL-V2T4
0.49609375 µm
75 mm (2.953 ")
15 µm (0.000591 ")
< 21 µm (< 0.000827 ")
LRQ150AL-V2T4
0.09921875 µm
150 mm (5.905 ")
45 µm (0.001772 ")
< 8 µm (< 0.000315 ")
LRQ150BL-V2T4
0.49609375 µm
150 mm (5.905 ")
25 µm (0.000984 ")
< 21 µm (< 0.000827 ")
LRQ300AL-V2T4
0.09921875 µm
300 mm (11.811 ")
90 µm (0.003543 ")
< 8 µm (< 0.000315 ")
LRQ300BL-V2T4
0.49609375 µm
300 mm (11.811 ")
35 µm (0.001378 ")
< 21 µm (< 0.000827 ")
LRQ450AL-V2T4
0.09921875 µm
450 mm (17.716 ")
135 µm (0.005315 ")
< 8 µm (< 0.000315 ")
LRQ450BL-V2T4
0.49609375 µm
450 mm (17.716 ")
60 µm (0.002362 ")
< 21 µm (< 0.000827 ")
LRQ600AL-V2T4
0.09921875 µm
600 mm (23.622 ")
150 µm (0.005905 ")
< 8 µm (< 0.000315 ")
LRQ600BL-V2T4
0.49609375 µm
600 mm (23.622 ")
90 µm (0.003543 ")
< 21 µm (< 0.000827 ")
Part Number Maximum Speed Minimum Speed Speed Resolution Peak Thrust LRQ075AL-V2T4
35 mm/s (1.378 "/s)
0.000061 mm/s (0.000002 "/s)
0.000061 mm/s (0.000002 "/s)
100 N (22.4 lb)
LRQ075BL-V2T4
205 mm/s (8.071 "/s)
0.000303 mm/s (0.000012 "/s)
0.000303 mm/s (0.000012 "/s)
60 N (13.5 lb)
LRQ150AL-V2T4
35 mm/s (1.378 "/s)
0.000061 mm/s (0.000002 "/s)
0.000061 mm/s (0.000002 "/s)
100 N (22.4 lb)
LRQ150BL-V2T4
205 mm/s (8.071 "/s)
0.000303 mm/s (0.000012 "/s)
0.000303 mm/s (0.000012 "/s)
60 N (13.5 lb)
LRQ300AL-V2T4
35 mm/s (1.378 "/s)
0.000061 mm/s (0.000002 "/s)
0.000061 mm/s (0.000002 "/s)
100 N (22.4 lb)
LRQ300BL-V2T4
205 mm/s (8.071 "/s)
0.000303 mm/s (0.000012 "/s)
0.000303 mm/s (0.000012 "/s)
60 N (13.5 lb)
LRQ450AL-V2T4
35 mm/s (1.378 "/s)
0.000061 mm/s (0.000002 "/s)
0.000061 mm/s (0.000002 "/s)
100 N (22.4 lb)
LRQ450BL-V2T4
205 mm/s (8.071 "/s)
0.000303 mm/s (0.000012 "/s)
0.000303 mm/s (0.000012 "/s)
60 N (13.5 lb)
LRQ600AL-V2T4
35 mm/s (1.378 "/s)
0.000061 mm/s (0.000002 "/s)
0.000061 mm/s (0.000002 "/s)
100 N (22.4 lb)
LRQ600BL-V2T4
205 mm/s (8.071 "/s)
0.000303 mm/s (0.000012 "/s)
0.000303 mm/s (0.000012 "/s)
60 N (13.5 lb)
Part Number Maximum Continuous Thrust Vertical Runout Horizontal Runout Pitch LRQ075AL-V2T4
100 N (22.4 lb)
< 20 µm (< 0.000787 ")
< 20 µm (< 0.000787 ")
0.025 ° (0.436 mrad)
LRQ075BL-V2T4
60 N (13.5 lb)
< 20 µm (< 0.000787 ")
< 20 µm (< 0.000787 ")
0.025 ° (0.436 mrad)
LRQ150AL-V2T4
100 N (22.4 lb)
< 25 µm (< 0.000984 ")
< 20 µm (< 0.000787 ")
0.03 ° (0.523 mrad)
LRQ150BL-V2T4
60 N (13.5 lb)
< 25 µm (< 0.000984 ")
< 20 µm (< 0.000787 ")
0.03 ° (0.523 mrad)
LRQ300AL-V2T4
100 N (22.4 lb)
< 35 µm (< 0.001378 ")
< 30 µm (< 0.001181 ")
0.034 ° (0.593 mrad)
LRQ300BL-V2T4
60 N (13.5 lb)
< 35 µm (< 0.001378 ")
< 30 µm (< 0.001181 ")
0.034 ° (0.593 mrad)
LRQ450AL-V2T4
100 N (22.4 lb)
< 45 µm (< 0.001772 ")
< 40 µm (< 0.001575 ")
0.04 ° (0.698 mrad)
LRQ450BL-V2T4
60 N (13.5 lb)
< 45 µm (< 0.001772 ")
< 40 µm (< 0.001575 ")
0.04 ° (0.698 mrad)
LRQ600AL-V2T4
100 N (22.4 lb)
< 75 µm (< 0.002953 ")
< 60 µm (< 0.002362 ")
0.045 ° (0.785 mrad)
LRQ600BL-V2T4
60 N (13.5 lb)
< 75 µm (< 0.002953 ")
< 60 µm (< 0.002362 ")
0.045 ° (0.785 mrad)
Part Number Roll Yaw Linear Motion Per Motor Rev Weight LRQ075AL-V2T4
0.01 ° (0.174 mrad)
0.02 ° (0.349 mrad)
1.27 mm (0.050 ")
2.27 kg (5.004 lb)
LRQ075BL-V2T4
0.01 ° (0.174 mrad)
0.02 ° (0.349 mrad)
6.35 mm (0.250 ")
2.27 kg (5.004 lb)
LRQ150AL-V2T4
0.015 ° (0.262 mrad)
0.02 ° (0.349 mrad)
1.27 mm (0.050 ")
2.64 kg (5.820 lb)
LRQ150BL-V2T4
0.015 ° (0.262 mrad)
0.02 ° (0.349 mrad)
6.35 mm (0.250 ")
2.64 kg (5.820 lb)
LRQ300AL-V2T4
0.015 ° (0.262 mrad)
0.03 ° (0.523 mrad)
1.27 mm (0.050 ")
3.4 kg (7.496 lb)
LRQ300BL-V2T4
0.015 ° (0.262 mrad)
0.03 ° (0.523 mrad)
6.35 mm (0.250 ")
3.4 kg (7.496 lb)
LRQ450AL-V2T4
0.025 ° (0.436 mrad)
0.04 ° (0.698 mrad)
1.27 mm (0.050 ")
4.15 kg (9.149 lb)
LRQ450BL-V2T4
0.025 ° (0.436 mrad)
0.04 ° (0.698 mrad)
6.35 mm (0.250 ")
4.15 kg (9.149 lb)
LRQ600AL-V2T4
0.035 ° (0.611 mrad)
0.04 ° (0.698 mrad)
1.27 mm (0.050 ")
4.86 kg (10.714 lb)
LRQ600BL-V2T4
0.035 ° (0.611 mrad)
0.04 ° (0.698 mrad)
6.35 mm (0.250 ")
4.86 kg (10.714 lb)
Specification Charts and Notes
Thrust or torque is a function of speed. The values given above are maximums. These values cannot both be achieved simultaneously (i.e. at maximum speed, the unit will not produce maximum thrust).