X-LRQ-SV1 Series: Low vacuum motorized linear stages with built-in controllers
Vacuum compatible to 10-3 Torr
75, 150, 300, 450, 600 mm travel
Up to 205 mm/s speed and up to 100 N thrust
100 kg load capacity
Built-in controller; daisy-chains with other Zaber products
Only 4 feedthrough wires required to control all units in the daisy-chain via serial port (with an X-PIB adaptor)
For more information about the basics of a vacuum system and considerations to keep in mind when gathering requirements for your application, read our technical article, "Motion Device Design Considerations for Vacuum Applications".
Zaber's X-LRQ-SV1 Series devices are low-vacuum, computer-controlled, motorized linear stages with high stiffness, load, and lifetime capabilities in a compact size. They are stand-alone units requiring only a standard 24 V or 48 V power supply.
These stages connect to the RS-232 port or USB port of any computer, and they can be daisy-chained with any other Zaber products. The daisy-chain also shares power, making it possible for multiple X-Series products to share a single power supply.
At only 36 mm high, these vacuum stages are excellent for applications where a low profile is required. The X-LRQ-SV1's innovative design allows speeds up to 205 mm/s and loads up to 100 kg. Like all of Zaber's products, the X-LRQ-SV1 Series is designed to be 'plug and play' and very easy to set up and operate. These stages can bolt together into an XY system.
Zaber's positioners with built-in controllers, stand-alone controllers, and joysticks are divided into three series: the T-Series, the A-Series, and the X-Series.
Part Numbering Scheme
Specification Value Alternate Unit Built-in Controller
Yes
Repeatability
< 2.5 µm
< 0.000098 "
Communication Interface
RS-232
Communication Protocol
Zaber ASCII (Default), Zaber Binary
Maximum Centered Load
1000 N
224.3 lb
Maximum Cantilever Load
3000 N⋅cm
4248.4 oz⋅in
Guide Type
Recirculating Ball Linear Guide
Stiffness in Pitch
640 N⋅m/°
27 µrad/N⋅m
Stiffness in Roll
1850 N⋅m/°
9 µrad/N⋅m
Stiffness in Yaw
665 N⋅m/°
26 µrad/N⋅m
Maximum Current Draw
1200 mA
Power Supply
24-48 VDC
Power Plug
None, use X-PIB
Motor Steps Per Rev
200
Motor Type
Stepper (2 phase)
Motor Rated Current
2100 mA/phase
Inductance
2.8 mH/phase
Default Resolution
1/64 of a step
Data Cable Connection
Teflon flying leads with M8 4 pin M/F
Mechanical Drive System
Precision lead screw
Limit or Home Sensing
Magnetic home sensor
Manual Control
No
Axes of Motion
1
LED Indicators
Yes
Mounting Interface
M6 and M3 threaded holes
Operating Temperature Range
0 to 50 °C
Vacuum Compatible
Low vacuum (10-3 Torr)
RoHS Compliant
Yes
CE Compliant
Yes
Comparison - X-LRQ-SV1 Series
Part Number Microstep Size (Default Resolution) Travel Range Accuracy (unidirectional) Backlash X-LRQ075AL-SV1
0.09921875 µm
75 mm (2.953 ")
23 µm (0.000906 ")
< 8 µm (< 0.000315 ")
X-LRQ075BL-SV1
0.49609375 µm
75 mm (2.953 ")
15 µm (0.000591 ")
< 21 µm (< 0.000827 ")
X-LRQ150AL-SV1
0.09921875 µm
150 mm (5.905 ")
45 µm (0.001772 ")
< 8 µm (< 0.000315 ")
X-LRQ150BL-SV1
0.49609375 µm
150 mm (5.905 ")
25 µm (0.000984 ")
< 21 µm (< 0.000827 ")
X-LRQ300AL-SV1
0.09921875 µm
300 mm (11.811 ")
90 µm (0.003543 ")
< 8 µm (< 0.000315 ")
X-LRQ300BL-SV1
0.49609375 µm
300 mm (11.811 ")
35 µm (0.001378 ")
< 21 µm (< 0.000827 ")
X-LRQ450AL-SV1
0.09921875 µm
450 mm (17.716 ")
135 µm (0.005315 ")
< 8 µm (< 0.000315 ")
X-LRQ450BL-SV1
0.49609375 µm
450 mm (17.716 ")
60 µm (0.002362 ")
< 21 µm (< 0.000827 ")
X-LRQ600AL-SV1
0.09921875 µm
600 mm (23.622 ")
150 µm (0.005905 ")
< 8 µm (< 0.000315 ")
X-LRQ600BL-SV1
0.49609375 µm
600 mm (23.622 ")
90 µm (0.003543 ")
< 21 µm (< 0.000827 ")
Part Number Maximum Speed Minimum Speed Speed Resolution Peak Thrust X-LRQ075AL-SV1
35 mm/s (1.378 "/s)
0.000061 mm/s (0.000002 "/s)
0.000061 mm/s (0.000002 "/s)
100 N (22.4 lb)
X-LRQ075BL-SV1
205 mm/s (8.071 "/s)
0.000303 mm/s (0.000012 "/s)
0.000303 mm/s (0.000012 "/s)
60 N (13.5 lb)
X-LRQ150AL-SV1
35 mm/s (1.378 "/s)
0.000061 mm/s (0.000002 "/s)
0.000061 mm/s (0.000002 "/s)
100 N (22.4 lb)
X-LRQ150BL-SV1
205 mm/s (8.071 "/s)
0.000303 mm/s (0.000012 "/s)
0.000303 mm/s (0.000012 "/s)
60 N (13.5 lb)
X-LRQ300AL-SV1
35 mm/s (1.378 "/s)
0.000061 mm/s (0.000002 "/s)
0.000061 mm/s (0.000002 "/s)
100 N (22.4 lb)
X-LRQ300BL-SV1
205 mm/s (8.071 "/s)
0.000303 mm/s (0.000012 "/s)
0.000303 mm/s (0.000012 "/s)
60 N (13.5 lb)
X-LRQ450AL-SV1
35 mm/s (1.378 "/s)
0.000061 mm/s (0.000002 "/s)
0.000061 mm/s (0.000002 "/s)
100 N (22.4 lb)
X-LRQ450BL-SV1
205 mm/s (8.071 "/s)
0.000303 mm/s (0.000012 "/s)
0.000303 mm/s (0.000012 "/s)
60 N (13.5 lb)
X-LRQ600AL-SV1
35 mm/s (1.378 "/s)
0.000061 mm/s (0.000002 "/s)
0.000061 mm/s (0.000002 "/s)
100 N (22.4 lb)
X-LRQ600BL-SV1
205 mm/s (8.071 "/s)
0.000303 mm/s (0.000012 "/s)
0.000303 mm/s (0.000012 "/s)
60 N (13.5 lb)
Part Number Maximum Continuous Thrust Vertical Runout Horizontal Runout Pitch X-LRQ075AL-SV1
100 N (22.4 lb)
< 20 µm (< 0.000787 ")
< 20 µm (< 0.000787 ")
0.025 ° (0.436 mrad)
X-LRQ075BL-SV1
60 N (13.5 lb)
< 20 µm (< 0.000787 ")
< 20 µm (< 0.000787 ")
0.025 ° (0.436 mrad)
X-LRQ150AL-SV1
100 N (22.4 lb)
< 25 µm (< 0.000984 ")
< 20 µm (< 0.000787 ")
0.03 ° (0.523 mrad)
X-LRQ150BL-SV1
60 N (13.5 lb)
< 25 µm (< 0.000984 ")
< 20 µm (< 0.000787 ")
0.03 ° (0.523 mrad)
X-LRQ300AL-SV1
100 N (22.4 lb)
< 35 µm (< 0.001378 ")
< 30 µm (< 0.001181 ")
0.034 ° (0.593 mrad)
X-LRQ300BL-SV1
60 N (13.5 lb)
< 35 µm (< 0.001378 ")
< 30 µm (< 0.001181 ")
0.034 ° (0.593 mrad)
X-LRQ450AL-SV1
100 N (22.4 lb)
< 45 µm (< 0.001772 ")
< 40 µm (< 0.001575 ")
0.04 ° (0.698 mrad)
X-LRQ450BL-SV1
60 N (13.5 lb)
< 45 µm (< 0.001772 ")
< 40 µm (< 0.001575 ")
0.04 ° (0.698 mrad)
X-LRQ600AL-SV1
100 N (22.4 lb)
< 75 µm (< 0.002953 ")
< 60 µm (< 0.002362 ")
0.045 ° (0.785 mrad)
X-LRQ600BL-SV1
60 N (13.5 lb)
< 75 µm (< 0.002953 ")
< 60 µm (< 0.002362 ")
0.045 ° (0.785 mrad)
Part Number Roll Yaw Linear Motion Per Motor Rev Weight X-LRQ075AL-SV1
0.01 ° (0.174 mrad)
0.02 ° (0.349 mrad)
1.27 mm (0.050 ")
2.27 kg (5.004 lb)
X-LRQ075BL-SV1
0.01 ° (0.174 mrad)
0.02 ° (0.349 mrad)
6.35 mm (0.250 ")
2.27 kg (5.004 lb)
X-LRQ150AL-SV1
0.015 ° (0.262 mrad)
0.02 ° (0.349 mrad)
1.27 mm (0.050 ")
2.64 kg (5.820 lb)
X-LRQ150BL-SV1
0.015 ° (0.262 mrad)
0.02 ° (0.349 mrad)
6.35 mm (0.250 ")
2.64 kg (5.820 lb)
X-LRQ300AL-SV1
0.015 ° (0.262 mrad)
0.03 ° (0.523 mrad)
1.27 mm (0.050 ")
3.4 kg (7.496 lb)
X-LRQ300BL-SV1
0.015 ° (0.262 mrad)
0.03 ° (0.523 mrad)
6.35 mm (0.250 ")
3.4 kg (7.496 lb)
X-LRQ450AL-SV1
0.025 ° (0.436 mrad)
0.04 ° (0.698 mrad)
1.27 mm (0.050 ")
4.15 kg (9.149 lb)
X-LRQ450BL-SV1
0.025 ° (0.436 mrad)
0.04 ° (0.698 mrad)
6.35 mm (0.250 ")
4.15 kg (9.149 lb)
X-LRQ600AL-SV1
0.035 ° (0.611 mrad)
0.04 ° (0.698 mrad)
1.27 mm (0.050 ")
4.86 kg (10.714 lb)
X-LRQ600BL-SV1
0.035 ° (0.611 mrad)
0.04 ° (0.698 mrad)
6.35 mm (0.250 ")
4.86 kg (10.714 lb)
Specification Charts and Notes
Thrust or torque is a function of speed. The values given above are maximums. These values cannot both be achieved simultaneously (i.e. at maximum speed, the unit will not produce maximum thrust).