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EB系列mmW探针台

频率最高达一太赫兹1THz，直接将射频针头的导波管与倍频器的导波管对接，因为省掉额外的导波管使得信号损失降低到最小，各家厂牌的倍频器都可以架设。

EB-6V mmW Probe Station

The EB-6V probe station is designed for all frequency extenders such as those from VDI, OML, R&S, Keysight, Anritsu. If you are using an Anritsu VNA VectorStar ME7838A4 model, or commonly Anritsu 3743A mmW Extenders and related sizes, the station of interest is the EB-6A.

The EB-6V is a market proven solution for mmW research. The following features are available to the system:

Features

 - Customized positioners to reduce waveguides between millimeter-wave modules and probe head

 - Firm and stable positioners for extenders and tuners of all sizes

 - Integrated dial gauge determining contact scratch on probes

 - Precise integration allowing direct link of probes

 - North and south bridge for additional DC and RF micropositioners

 - Coaxial style high precision stage

 - Back-lash free movement

 - Micropositioner Standby Dock

Applications

 - High Performance RF

 - Single Broadband Probing

 - Dierential mm-Wave

 - Basic DC (IV/CV)

Accessories

 - Hot Chuck with Auxiliary Chuck with Temperature Controller

 - Vibration Free Table

 - Shielding Box

 

Station Specifications

Station Footprint	760 mm W x 660mm D
Station Height	450 mm (to Platen)/700 mm (to Microscope)
Station Weight	80kg
Platen Material	Hard Chrome Plated Steel
Platen Dimension	120 mm x 180 mm (North and South)
Platen Capacity	4 RF and 2 DC or 2 RF and 4 DC
Positioner Mount	Magnetic ON/OFF Switch
No. of Vacuum Switches	4
Chuck Material	Stainless Steel
Chuck Stage Type	Coaxial
Chuck Travel Range	6” x 6”
Chuck Fine Resolution	1 µm
Chuck Theta Coarse Travel	360˚
Chuck Theta Fine Resolution	0.01˚
Chuck Z-Motion Range	4 mm
Chuck Z-Fine Resolution	1 µm
Coaxial Chuck Movement	Bevelled Gear and Rack 0.8 mm Pitch
Chuck Size	6” (150 mm)
Chuck Planarity	3 µm
Chuck Rigidity	15 µm / 10 N @ edge
Chuck Vacuum Grooves	Center, 1.5”, 3.5”,7” (Individually Controlled)
Chuck Bias Capacity	Up to 2 kV
Chuck Isolation	5 GK
DUT Size Range	2 mm - 150 mm
Microscope Stage Type	High Precision Linear Stage
Microsope Stage Resolution	1 µm
Microscope Stage Travel Range	2” x 2”
Microscope Z-Lih(Optional)	6 mm (Pneumatic)
Microscope Zoom Range	1.4x - 9x
Microscope Eye Piece	30x
Microscope Trinocular Port	C-Mount, 2x Adapter
Microscope Magnification Range	42x-270x

评估射频mmW探针台注意事项：

1.防震桌

来自于地的振动噪声干扰，当探针站在电极上，防止针在电极上刮来刮去影响到彼此的接触。 信号进出频率愈高愈是在意。 客户端经常出现的问题，这个实验室以及整栋建筑物在结构设计上就比较脆弱，很容易产生共振，当微小的震动来的时候，随着楼层越高，震动到实验室的现场位置被放大了更大。 奕叶都会派工程师到现场量震动，机器进场前选择适当的地点安装！

2.探针台

穏定的台体，硬件机械架构的强度与其重心配置。 其次为载台的XY、Z滑台及显微镜XY功能、精度、稳定性及操控性都至关重要。

3.探针座

有别于直流量测的探针座，高频量测时探针座本身的重心配置的稳定性要高之外，控制探针的机械调整精度必需1 micron 以上，下针后滑行距离可细腻调整到不同应用及材料所需的接触应力。 频率愈高，间距愈窄，控制探针的每一步的步进量也需愈小。 频率在90GHz以上的架设，在探针座本身的稳定及精度之外，要将探针座背另外一个倍频器一起规划，出现了其他的挑战，如何将大尺寸的倍频器收纳及超小倍频器在瞬间产生大量的热能的消散问题，设计上是一大考验。

4.探针

探针是元件与仪器信号之间的直接硬件接口，厂牌的选用也会影响到量测结果的可靠及重复性，要选用美制品牌，国际市场验证35年以上，校正数据库宏，可提供可靠之外，较深及较广的后续量测咨询。

商品属性
[Chuck Stage]	Coaxial
[Microscope Stage]	High Precision Linear Stage
[Resolution]	1 µm