FQCW 266-300
Diode Pumped Continuous Wave Solid State Laser
• 266 nm
• Continuous Wave
• Single Frequency
• Low Intensity Noise
• M² < 1.3, TEM00
• Up to 300 mW
• Air Cooled
• Patented Design (*)
lithography · inspection · spectroscopy · analytics
Optical Data
Wavelength
266 ± 1 nm
Nominal Output Power
300 ± 5 mW
Output Power Adjustability
30 – 330 mW
Linewidth
< 300 kHz
Coherence Length
> 1000 m
Beam Propagation Factor M²
< 1.3, TEM00
Polarisation orientation and purity
vertical, > 500:1
Beam Diameter
1.0 ± 0.2 mm
Beam Divergence
< 0.45 mrad
Beam Pointing Stability (2)
< 3 µrad/K, < 3 µrad/h
Static Alignment Tolerance (2)
lateral ± 0.25 mm, angular ± 2.5 mrad
Power Stability (1)
< 0.5 %rms
Intensity Noise (1 Hz – 100 kHz)
< 1 %rms
Intensity Noise (100 kHz – 250 MHz)
< 0.2 %rms
Electrical Data
Power Consumption Mean (Max)
< 200 W (450 W)
Line Voltage
90 - 250 V AC (50-60 Hz)
Communication Interfaces
USB / RS232 / Ethernet
Safety Features
key switch, interlock, electrical shutter
Miscellaneous
Warm-up Time
< 45 min
Operating Temperature (laser head)
20 - 35 °C non-condensing
Laser Head Dimensions
143 x 325 x 739 mm³ (H x W x L)
Control Unit Dimensions
184 x 483 x 411 mm³ (H x W x L)
Laser Head Weight
27 kg
Control
Unit Weight 8 kg
Notes
1. After 30 minutes warm-up in the temperature range 20 - 35 °C, temperature change < 1 K/h.
2. Position and angle of static alignment tolerances are specified with regard to laser beam exit.
3. The exit window is equipped with the Manual Window Shifter (MWS) in case of external photo contamination. This laser system is equipped with the Automatic Crystal Shifter (ACS).
(*) Protected by patents: DE10339210B4, EP1344105B1, US7027209B2, DE102010064382B4, US9429814B2, DE102012212428B4, US9024247
Dimensions
Laser Safety Labels
商品属性 [波长] 266 ± 1 nm [功率] 300 ± 5 mW