UPR-100 Ultraprecision Rotation Stage High Dynamics due to Magnetic Drive, High Stability
• Unlimited travel range • Velocity to 360 °/s • Incremental angle measuring system with 0.00002° resolution
• Clear aperture with 20 mm diameter
Reference-class rotation stage
High travel accuracy. High position resolution due to incremental encoder with analog signal transmission (sin/cos, 1 Vpp)
Magnetic direct drive
Ironless magnetic direct drive (torque motor) for high velocity and acceleration. High position resolution.
Fields of application
Industry and research. Metrology, semiconductor manufacturing and testing, synchrotron applications
specifications
680591111 Unit Tolerance Motion and Positioning
Active axes
θZ
Travel range
>360
°
Integrated sensor
Incremental angle measuring system
Sensor resolution*
0.00002
°
Minimum incremental motion
0.00008
°
typ.
Unidirectional repeatability
0.00008
°
typ.
Bidirectional repeatability
±0.0001
°
typ.
Flatness
±2.5
µm
typ.
Eccentricity
±3.5
µm
typ.
Wobble
±25
µrad
typ.
Velocity
360
°/s
max.
Mechanical Properties
Max. load, axial
20
N
max.
Max. load, radial
15
N
max.
Moved mass
0.4
kg
Overall mass
1.2
kg
Drive Properties
Drive type
Torque motor, ironless
Intermediate circuit voltage
48
VDC
max.
Peak torque
0.5
Nm
typ.
Nominal torque
0.16
Nm
typ.
Nominal current, effective
1.2
A
typ.
Torque constant, effective
0.13
Nm/A
typ.
Resistance per phase
6.6
Ω
typ.
Inductivity per phase
0.7
mH
typ.
Back EMF phase-phase
0.67
Vs/rad
max.
Reference point switch
Encoder Index
Miscellaneous
Operating temperature range
10 to 50
°C
Humidity
20 – 90% rel., not condensing
Material
Aluminum, black anodized
Recommended controller
SMC Hydra, ACS SPii+EC and other industrial solutions
* With SMC Hydra controller.
Ordering Information 680591111
UPR-100 Ultra Precision Rotation Stage, Torque Motor, High-Resolution Angle Measuring System with Sin/Cos Signal Transmission,
Hall-Effect Limit Switch
商品属性 [主动轴] θZ [行程] >360° [集成传感器] Incremental angle measuring system [电机类型] Torque motor, ironless [工作温度] 10~50℃ [最小位移] 0.00008°