STANDARD FEATURES
MAXIMUM Z STROKE:
27.5mm
PITCH & ROLL RANGE:
+/- 24 degrees
RANGE DEFINED AT MIDDLE OF Z STROKE
MOTORS:
(3) HR-2 CERAMIC SERVO
FORCE, STANDARD:
24 N
TRIPOD SPEED:
200mm/sec
ENCODERS:
(3) LINEAR OPTICAL
ENCODER OUTPUT:
ANALOG 1 VOLT, PEAK TO PEAK
ENCODER RESOLUTION:
5nm
BEARINGS:
PRECISION CROSSED ROLLER, PRECISION SPHERICAL JOINT & PRECISION BALL BEARINGS
STRUCTURE:
ALUMINUM 6061-T6
ENVIRONMENT:
STANDARD, CLEAN ROOM, VACUUM 10e-7 TORR, AND VACUUM 10e-10 TORR
TEMPERATURE:
0 to 50 ℃
HUMIDITY:
10% to 80% NON-CONDENSING
TOTAL MASS:
1.7 kg
MOVING MASS:
0.33 kg
INCLUDED EQUIPMENT
MOTION CONTROLLERS (DELTA TAU)
MOTOR AMPLIFIERS
SOFTWARE AND LICENSE
商品属性 [行程] 27.5mm [工作温度] 0-50℃ [分辨率] 5nm