STANDARD FEATURES
MAXIMUM Z STROKE:
100mm
PITCH & ROLL RANGE:
+/- 35 degrees
RANGE DEFINED AT MIDDLE OF Z STROKE
MOTORS:
(6) HR-8 CERAMIC SERVO
FORCE, STANDARD:
192 N
TRIPOD SPEED:
200mm/sec
ENCODERS:
(3) LINEAR OPTICAL
ENCODER OUTPUT:
ANALOG 1 VOLT, PEAK TO PEAK
ENCODER RESOLUTION:
5nm
BEARINGS:
PRECISION CROSSED ROLLER, PRECISION SPHERICAL JOINT & PRECISION BALL BEARINGS
STRUCTURE:
ALUMINUM 6061-T6
ENVIRONMENT:
STANDARD, CLEAN ROOM, VACUUM 10e-7 TORR, AND VACUUM 10e-10 TORR
TEMPERATURE:
0 to 50 ℃
HUMIDITY:
10% to 80% NON-CONDENSING
TOTAL MASS:
11 kg
MOVING MASS:
3.1 kg
INCLUDED EQUIPMENT
MOTION CONTROLLERS (DELTA TAU)
MOTOR AMPLIFIERS
SOFTWARE AND LICENSE
商品属性 [行程] 100mm [工作温度] 0-50℃ [分辨率] 5nm