EX5 MINI EXCIMER LASER
6W of deep UV (193nm) in 1.4 cubic feet, 15kg
THE ONLY MINI EXCIMER THAT REALLY IS SMALL AND LIGHT WEIGHT
FEATURES
Billons of pulses system lifetime
Instant ant on
Up to 2kHz Operation
2nS RMS JITTER WITH solid state switch
Applications
• Replacement Medical Lasers
• Ionization source
• Micromachining
• Precision Marking
• Refractive Surgery
• Raman spectroscopy
The EX5 a genuine full function MINI excimer laser in an ultra compact 48 X 26 X 26cm, 15kg, air cooled package with up to 8.0W at 248nm and 4.0W at 193nm and up to 1000Hz repetition rate. The laser design features include an internal Faraday cage for ultra low electrical noise and all metal/ceramic construction. The EX5A is now available in 250Hz, 500Hz and 1000Hz versions. The EX5A SUPER CHAMBER produces higher average power output with longer gas lifetime. F2 operation in the VUV is also standard with up to 1W output power. A new broadband optics set allows operation from 157nm to 351nm with full specifications simply by changing the gas.
Highlights
2 year warranty
Light, compact and easily portable
Long system lifetime Billions of pulses for Industrial installations
15kg,
Mini excimer in a single package
Internal vacuum pump and halogen filter
Computer controlled
Ultra Low trigger jitter
High reliability state of the art, long life laser chamber
Excellent pulse to pulse stability
Very long shelf life
EX5A/1000 NEW 20000Hz version
High duty cycle Industrial version
20mJ TEM00 C02 TEA Version
EX5 Specifications
PARAMETER
F2
ArF
KrF
XeCl
XeF
Wavelength nm
157
193
248
308
351
Energy Max. mJ
1.5/2.0*
12
20
8
6
Peak Power MW
0.25
1.75
2.5
1.0
0.75
Average Power W @ 250Hz
0.3/0.4
2.5
4.0
1.5
1.3
Average Power W @ 500Hz
0.5
5.0
8.0
2.5
2.4
Repetition rate
250/500/750
Dynamic gas lifetime Pulses to 50% energy
10E6
12E6
18E6
20E6
15E6
Shelf life to 50% energy
10 days
15 days
30 days
2 Months
30 Days
Pulse Length nS
7--9
Stability
<2% Standard Deviation
Tube Service
2 Billion Pulses
Beam Size, mm
3X 6
Divergence, mRad full angle
1 X 2
Cooling
Air standard/Optional Water
Timing Jitter
2nS Standard Deviation
Weight
15kg 250/500Hz
*2mJ for F2 optimized version.
Laser performance
商品属性 [波长] 157/193/248/308/351nm [脉宽] 7--9ns [峰值功率] 0.25/1.75/2.5/1.0/0.75MW [重复频率] 250/500/750Hz