EX50 EXCIMER LASER
The EX50/1000 35W KrF LaserFor applications requiring high repetition rate and moderate average power, when you need a compact air or water cooled laser, the EX50 is the choice. The EX50 excimer laser offers state of the art performance in a compact package. The EX50 provides a highly reliable powerful source of ultraviolet radiation. Four models with repetition rates up to 250Hz, 500Hz and 750Hz are available with average powers to 35W with KrF at 248nm and 18W with ArF at 193nm. Long gas lifetime gives up to 1 year of operation between refills with XeCl. For applications in precision micromachining, tunable laser pumping, marking and semiconductor processing.
The EX50 laser is a total metal/ceramic device of advanced design. The carefully selected materials used in the laser construction give the EX50 static and dynamic gas lifetimes unmatched by any other excimer laser.
Applications
Pulsed laser deposition
Ionization
Micromachining
Key Benefits
Up to 750Hz repetition rate
Internal vacuum pumps and Halogen filter
High Power in a compact package
High reliability long life laser chamber
Excellent pulse to pulse stability
1 Billion pulse optics service
Soft Corona preionization
PARAMETER
F2
ArF
KrF
XeCl
XeF
Wavelength nm
157
193
248
308
351
Energy Max. mJ
2.5
35
50
22
20
Average Power @250Hz
.5
5
10
5
5
Average Power @500Hz
1
10
20
10
9
Repetition Rate
250/500/750
Dynamic gas lifetime Pulses to 50% energy
15E6
25E6
35E6
30E6
30E6
Shelf life Approx. to 50% energy
15 days
90 days
120 days
>1 Year
120 Days
Pulse Length
10
17-20 nS
Beam Size
9 X 4 mm
Stability
<2% Standard Deviation
Tube Service
3 Billion Pulses
Divergence
.8 X 1.6 mRad full angle
Cooling
Air/Water
Window Service
300E6
500E6
>1 billion
200E6
300E6
商品属性 [波长] 157/193/248/308/351nm [脉宽] 10/17-20 nS [重复频率] 250/500/750Hz