EX100 EXCIMER LASER
EX100/125 Air cooled laser
The EX100 excimer lasers are designed to provide high power industrial laser performance in a low cost, high reliability system. The unique linear design of GAM LASER products allows power scaling to be achieved at low incremental cost. The EX100 provides the first cost effective high power excimer laser. The EX100 gives repetition rates to 750Hz with all excimer gases and F2 at 157nm, lower repetition rate versions are also available. The laser gives up to 68W output power with KrF and 32W with ArF. Exceptional dynamic and static gas lifetime is obtained from the total metal/ceramic design and corona preionization system with over 30 million pulses to 50% energy on KrF and 12 weeks static gas lifetime. An industrial version gives longer gas lifetime. The laser is a total metal/ceramic device and uses the most advanced design of any commercial excimer laser.
Applications
Pulsed laser deposition
Ionization
Micromachining
Key Benefits
A powerful high repetition rate system in a compact package.
Low divergence output
Excellent pulse to pulse stability
NEW EX100 HIGH ENERGY EXCIMER LASER SPECIFICATIONS
PARAMETER
F2
ArF
KrF
XeCl
XeF
Wavelength nm
157
193
248
308
351
Energy Max. mJ
10
75
125
65
60
Average Power 60Hz
0.5
4
6
3
3
Average Power @125Hz
1.0
8
12
6
6
Average Power @250Hz
2.0
16
24
13
10
Dynamic gas lifetime Pulses to 50% energy
10E6
15E6
20E6
20E6
20E6
Shelf life Approx. to 50% energy
15 days
60 days
90 days
>6 Months
90 Days
Pulse Length, ns
15-22
Beam Size, mm
10 X 5
Stability
<2% Standard Deviation
Tube Service
2 Billion Pulses
Divergence, mRad full angle
0.8 X 1.5
Cooling
Air/Water
商品属性 [波长] 157/193/248/308/351nm [脉宽] 15-22ns