THE EX350 EXCIMER LASER
The EX350 is a high energy excimer laser producing up to 250mJ output energy at 248nm and 150mJ at 193nm. The laser is designed for applications requiring high pulse energy such as Pulsed Laser Deposition.
Key Benefits
Available in 20Hz and 50Hz versions
High Energy in a single table top package
Low divergence beam
Computer controlled scientific instrument
Low Jitter <2nS standard deviation
EX350 Specifications
PARAMETER
F2 note 1
ArF
KrF
XeCl
XeF
Wavelength nm
157
193
248
308
351
Energy Max. mJ
20
150
275
125
100
Average Power 20Hz version
3
5
3
2
Average Power 50Hz version
5
10
6
4
Shelf life Approx. to 50% energy
5 days
20 days
30 days
6 months
30 Days
Pulse Length
18-22 nS
System lifetime
Billions of pulses
Beam Size
19 X 7 mm
Divergence
3.0 X 1.2 mRad
Stability
<2% Standard Deviation
Timing Jitter
+/- 2nS
Dimensions
850 X 430 X 330 mm
Cooling
Air/ Water
Electrical
115/220 AC 20/10A
Weight
75kg
Note 1 !57nm 10Hz only
商品属性 [波长] 157/193/248/308/351nm [脉宽] 18-22 nS