The EX350A High Energy laser
EX350A Specifications
PARAMETER
F2
ArF
KrF
XeCl
XeF
Wavelength nm
157
193
248
308
351
Energy Max. mJ
22
200
350
200
125
Average Power 20Hz version
0.4
3.0
6.0
3.0
2.0
Average Power 50Hz version
0.9
6
12
6
4
Shelf life Approx. to 50% energy
10 days
20 days
30 days
6 months
30 Days
Pulse Length
18-22 nS
Beam Size
19 X 7 mm
Divergence
3.0 X 1.2 mRad
Stability
<2% Standard Deviation
Timing Jitter
+/- 2nS
System Lifetime
> I Billion pulses
Dimensions
1420 X 430 X 330 mm
Cooling
Air/ Water
Weight
80kg
商品属性 [波长] 157/193/248/308/351nm [脉宽] 18-22 nS