The Ex5ALN narrow mini line narrowed laser
EX5ALN Specifications
PARAMETER
ArF
KrF
Wavelength, nm
193
248
Energy Max., mJ
5
15
Line width, pm typical
25
20
Spectral Line shape
Gaussian
Tunability
+/-200pm
+/-200pm
Average Power @ 25Hz W
0.1
0.3
Average Power @ 250Hz W
1.0
2.5
Repetition Rate Max. Hz
25/250
Stabilty
<3% 1 Sigma
Shelf life to 50% energy
3 days
10 days
Pulse Length nS
8
Stability
<3% One Sigma
Tube Service
1000 Million Pulses
Beam Size, mm
3X 6
Divergence, mRad full angle
1 X 2
Cooling
AIR
Timing Jitter
2nS One Sigma
Weight
16kg
商品属性 [波长] 193/248/nm [脉宽] 8 ns [重复频率] 25/250Hz