Nano-OP Series
Features
High speed piezo nanopositioner
Stackable for multi-axis motion
30, 65, and 100 μm ranges of motion
Closed loop control
Typical Applications
Interferometry
Nanomanipulation
High speed lens focusing
Fiber optics
NSOM
Product Description
The Nano-OP Series is a versatile group of compact piezo nanopositioners which can be configured to fit into a wide variety of applications. Individual, single axis stages may be combined to form multi-axis systems. The Nano-OP Series are available with 30, 65, and 100 micron ranges of motion. They can be constructed from aluminum, invar, or titanium and can be customized to suit unique requirements. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer resolution under closed loop control.
For applications requiring high speed objective lens positioning, see the High Speed Lens Positioner page. The Nano-OP Series is available with metric tapped holes, see the Nano-OP-M Series Drawing. For applications requiring a through hole, see the Nano-OPH Series.
Technical Specifications
Range of motion (Nano-OP30)
30 μm
Range of motion (Nano-OP65)
65 μm
Range of motion (Nano-OP100)
100 μm
Resolution (30/65/100 μm)
0.06/0.13/0.2 nm
Resonant Frequency
4 kHz ±20%
Resonant Frequency (100g load)
2 kHz ±20%
Stiffness
3.0 N/μm ±20%
θ roll, θ pitch (typical)
≤1 μrad
θ yaw (typical)
≤2 μrad
Recommended max. load (horizontal)*
1.0 kg
Recommended max. load (vertical)*
0.5 kg
Body Material
Al, Invar or Titanium
Controller
Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.
Nano-OP30 Position Noise Spectrum
Nano-OP Series Drawing
商品属性 [行程] 65 μm [刚性] 3.0 N/μm ±20% [负载] 1.0 kg [分辨率] 0.13nm