Nano-MET10 and Nano-MET20
Features
Compact footprint piezo nanopositioner
Single axis - 10 or 20 microns
Closed loop control
Ultra-low noise performance
Picometer positioning resolution
High speed
Typical Applications
High speed, high resolution positioning
Metrology
AFM
SPM
Product Description
The Nano-MET10 and Nano-MET20 are compact, single axis piezo nanopositioning systems with exceptional resonant frequency and low noise characteristics. The Nano-MET10 and Nano-MET20 have picometer positioning resolution. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement under closed loop control.
The low noise characteristics and high resonant frequencies make it ideal for demanding metrology applications that require noise floors less than 10 picometers and high speed performance. Related products include the Nano-METZ, Nano-MET2 and Nano- MET3 nanopositioning systems.
Technical Specifications
Range of motion (Nano-MET10)
10 μm
Range of motion (Nano-MET20)
20 μm
Resolution (Nano-MET10)
0.01 nm
Resolution (Nano-MET20)
0.02 nm
Resonant Frequency
4.6 kHz
Recommended max. load (horizontal)*
100 g
Recommended max. load (vertical)*
100 g
Body Material
Aluminum
Controller
Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.
商品属性 [行程] 10 μm [负载] 100 g [分辨率] 0.01 nm