Nano-Mini
Features
Ultra small footprint piezo nanopositioner: 1" x 1.5"
Stackable for XY motion
Closed loop control
Titanium or invar construction
Typical Applications
Optical fiber alignment
Optical positioning
Interferometry
Product Description
The Nano-Mini is one of the smallest flexure guided piezo nanopositioning stages available. Designed for optimum performance on a small footprint, this stage uses an innovative mini-cross section multilayer piezo ceramic which allows for a stiff stage to translate 10 microns with picometer precision. This unique design makes it ideal for applications in precision metrology and microscopy. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. Available in titanium or invar.
Technical Specifications
Range of motion
10 μm
Resolution
0.02 nm
Resonant Frequency
1.5 kHz ±20%
Resonant Frequency (50g load)
650 Hz ±20%
Stiffness
1.0 N/μm ±20%
θ roll, θ pitch (typical)
≤1 μrad
θ yaw (typical)
≤2 μrad
Recommended max. load (horizontal)*
0.5 kg
Recommended max. load (vertical)*
0.15 kg
Body Material
Titanium or Invar
Controller
Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.
Nano-Mini Drawing
商品属性 [行程] 10 μm [刚性] 1.0 N/μm ±20% [负载] 0.5 kg [分辨率] 0.02 nm