Nano-HSZ
Features
Single axis (Z) piezo nanopositionern
Step response less than 1 millisecond
Scans up to 500 Hz
Closed loop control
Combine with Nano-OP Series for multi-axis configurations
Typical Applications
High speed, high resolution positioning
Metrology
Interferometry
Product Description
The Nano-HSZ is a high speed single axis (Z-axis) precision piezo nanopositioning system. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-HSZ offers a compact footprint, ultra low noise characteristics, and a resonant frequency greater than 7 kHz. These characteristics make it ideal for applications that require noise floors less than 10 picometers and/or high speed performance. With the step response time of the Nano-HSZ set to less than 1 millisecond for extremely high speed applications, scan frequencies up to 500Hz can be achieved.
Nano-HSZ Position Noise Spectrum
Technical Specifications
Range of motion (Z)
10 μm
Resolution
0.01 nm
Resonant Frequency
7.5 kHz ±20%
Scanning Speed (full amplitude)
up to 500 Hz
Stiffness
12 N/μm
Recommended max. load (horizontal)*
0.1 kg
Recommended max. load (vertical)*
0.1 kg
Body Material
Al, Invar or Titanium
Controller
Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.
Nano-HSZ Drawing
商品属性 [行程] 10 μm [刚性] 12 N/μm [负载] 0.1 kg [分辨率] 0.01 nm