Nano-MET Series
Features
High speed, multi-axis piezo nanopositioner
2 and 3 axis configurations
Closed loop control
Ultra-low noise performance
Picometer positioning resolution
High stability
Typical Applications
High speed, high resolution positioning
Metrology
AFM
SPM
Product Description
The Nano-MET2 and Nano-MET3 are ultra-low noise, high precision piezo nanopositioning systems with picometer positioning resolution. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement under closed loop control. The ultra-low position noise (4 picometers/√Hz in XY and 400 femtometers/√Hz in Z) of these piezo nanopositioning systems make them ideal for demanding metrology applications. With a resonant frequency of 13.5kHz, the z-axis of the Nano-MET3 offers ultra-fast response needed for demanding AFM applications. Related products include the Nano-METZ,Nano-MET10 and Nano-MET20 nanopositioning systems.
Technical Specifications
Range of motion (XY)
75 μm
Range of motion (Z)
5 μm
Resolution (XY)
0.15 nm
Resolution (Z)
0.005 nm
Resonant Frequency (XY, Nano-MET2)
1.4 kHz
Resonant Frequency (XY, Nano-MET3))
1.0 kHz
Resonant Frequency (Z, Nano-MET3)
13.5 kHz
Recommended max. load (horizontal)*
100 g
Recommended max. load (vertical)*
100g
Body Material
Aluminum
Controller
Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.
Position Noise Spectrum
The Nano-MET Series demonstrates less than 4 picometers/√Hz of position noise on X and Y and less than 400 femtometers/√Hz of position noise on Z. Click below to enlarge and view the data for each axis.
Nano-MET2 Drawing (2 Axis)
Nano-MET3 Drawing (3 Axis)
商品属性 [行程] (XY)75 μm, (Z)5 μm [负载] 100 g [分辨率] (XY)0.15 nm, (Z)0.005 nm