Nano-M350
Features
Compact piezo nanopositioner
Three axis motion (XYZ)
50 μm x 50 μm x 20 μm ranges of motion
Closed loop control
Typical Applications
Alignment
MEMS
Nanolithography
SEM
Product Description
The Nano-M350 is a compact three axis (X, Y, Z) piezo nanopositioning system constructed from aluminum. The XY travel range is 50 μm and 20 μm in the Z axis under closed loop control. The compact design of the Nano-M350 allows it to be easily integrated into existing instrumentation for applications such as nanolithography, SEM. Internal position sensors utilizing proprietary PicoQ®technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-M350 has been designed for high speed performance in the Z-axis while maintaining high precision motion and is also available in high vacuum (non-bakeable) compatible models.
Technical Specifications
Range of motion (X)
50 μm
Range of motion (Y)
50 μm
Range of motion (Z)
20 μm
Resolution (20/50 μm)
0.04/0.1 nm
Resonant Frequency (X)
285 Hz ±20%
Resonant Frequency (Y)
285 Hz ±20%
Resonant Frequency (Z)
1580 Hz ±20%
θ roll, θ pitch (typical)
≤1 μrad
θ yaw (typical)
≤3 μrad
Recommended max. load (horizontal)*
0.5 kg
Recommended max. load (vertical)*
0.2 kg
Body Material
Auminum
Controller
Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.
Nano-M350 Drawing
商品属性 [行程] (X)50 μm(Y)50 μm(Z)20 μm [负载] 0.5 kg [分辨率] (20/50 μm)0.04/0.1 nm