Nano-Theta
Features
Precision rotation piezo nanopositioner: 2 mradians range
Accessible and well defined axis of rotation
Mount in any orientation
High resolution: 4 nanoradians
Closed loop control
Typical Applications
Laser beam scanning
Lithography
FBG writing
Interferometry
Product Description
The Nano-Theta is a unique piezo-actuated rotational stage having 2 milliradians of total motion. With nanoradian resolution, the Nano-Theta is designed for applications in lithography, optical disk manufacturing, and laser beam tracking or scanning. The innovative design of the Nano-Theta incorporates a readily accessible and well-defined axis of rotation which allows a mirror to be mounted so that it is co-planar with the axis of rotation. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with nanoradian accuracy under closed loop control.
Technical Specifications
Range of motion
2.0 mradians
Resolution
4 nradians
Resonant Frequency (unloaded).
2 kHz ±20%
Body Material
Al or Invar
Controller
Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.
Nano-Theta Drawing
商品属性 [行程] 2.0 mradians [分辨率] 4 nradians