Nano-Align3
Features
Low profile piezo nanopositioner: 0.8"
Three axis motion (Z θX θY)
Large center aperture: 2.6" x 2.6"
Long range: 100 μm or 200 μm (Z), 2mradians or 4mradians (θXθY)
Closed loop control
Typical Applications
Z-axis plus tip/tilt alignment
Nanolithography
Microscopy
MEMS
Product Description
The Nano-Align3 is a three axis (Z, θX , θY) piezo nanopositioning system with a large center aperture. The low profile design of the Nano-Align3 allows it to be integrated into existing instrumentation where space is restricted. The center aperture makes the Nano-Align3 ideal for demanding microscopy alignment applications which require long range travel and high precision. Internal position sensors utilizing proprietary PicoQ®technology provide picometer and nanoradian precision under closed loop control.
Technical Specifications
Ranges of motion (Nano-Align3-100)
Z axis
100 μm
θX and θY
2 mradian
Ranges of motion (Nano-Align3-200)
Z axis
200 μm
θX and θY
4 mradian
Resolution (Nano-Align3-100)
0.2nm/ 4 nradian
Resolution (Nano-Align3-200)
0.4nm/ 8 nradian
Resonant Frequency (Nano-Align3-100)
600 Hz ±20%
Resonant Frequency (Nano-Align3-200)
450 Hz ±20%
Stiffness
1.0 N/μm
Recommended max. load (horizontal)*
0.5 kg
Recommended max. load (vertical)*
0.2 kg
Body Material
Aluminum, Titanium, or Invar
Controller
Nano-Drive®/Nano-Drive®85
* Larger load requirements should be discussed with our engineering staff.
Nano-Align3 Series Drawing
商品属性 [行程] Z axis 200 μm θX and θY4 mradian [刚性] 1.0 N/μm [负载] 0.5 kg [分辨率] 0.4nm/ 8 nradian