Nano-Align6
Features
Low profile piezo nanopositioner
Six axis motion (XYZ θX θY θZ)
100 μm x 100 μm x 100 μm x 1.1 mrad x 1.5 mrad x 5 mrad ranges of motion
200 μm x 200 μm x 200 μm x 2.3 mrad x 3.0 mrad x 5 mrad ranges of motion
Center aperture: 35mm diameter
Closed loop control
Typical Applications
Alignment
MEMS
Nanolithography
Metrology
Product Description
The Nano-Align6 is a six axis (X, Y, Z, θX , θY, θZ) piezo nanopositioning system with a large center aperture. The Nano-Align6 is ideal for alignment applications which require three linear axes of motion (X, Y, Z) combined with rotational motion about each axis. The large aperture provides excellent access for microscopy optics, sample holders, and probe placement. The Nano-Align6 includes internal sensors on every axis using Mad City Labs’ proprietary PicoQ® technology for absolute position measurement and picometer/nanoradian accuracy under closed loop control.
Technical Specifications
Ranges of motion (Nano-Align6-100)
100 x 100 x 100 μm x 1.1 mrad (θX) x 1.5 mrad (θY) x 5 mrad (θZ)
Ranges of motion (Nano-Align6-200)
200 x 200 x 200 μm x 2.3 mrad (θX) x 3.0 mrad (θY) x 5 mrad (θZ)
Resolution (Nano-Align6-100)
0.2 nm (XYZ), 2.2 nrad (θX), 3.0 nrad (θY), 10 nrad (θZ)
Resolution (Nano-Align6-200)
0.4 nm (XYZ), 4.6 nrad (θX), 6.0 nrad (θY), 10 nrad (θZ)
Resonant Frequencies
X axis (Nano-Align6-100/Nano-Align6-200)
450/400 Hz ±20%
Y axis (Nano-Align6-100/Nano-Align6-200)
350/300 Hz ±20%
Z axis (Nano-Align6-100/Nano-Align6-200)
450/350 Hz ±20%
Recommended max. load (horizontal)*
0.5 kg
Recommended max. load (vertical)*
0.2 kg
Body Material
Aluminum, Titanium or Invar
Controller
Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.
Nano-Align6 Series Drawing
商品属性 [行程] 200 x 200 x 200 μm x 2.3 mrad (θX) x 3.0 mrad (θY) x 5 mrad (θZ) [负载] 0.5kg [分辨率] 0.4 nm (XYZ), 4.6 nrad (θX), 6.0 nrad (θY), 10 nrad (θZ)