Calibration Laser Interferometer
SP 15000 C - Series
Design and Operation
The measurement and calibration interferometers SP 15000 C with a measuring range of up to 50 m are designed for high-precision length, angle and straightness measurements on positioning axes. A synchronous, continuous 5 DOF-measurement is possible. The horizontal and vertical components of axis straightness are measured by using the interferometric principle. The reflfl ector unit is based on a combination of hollow retroreflfl ectors and a rotatable Wollaston prism. Other accessories are the straightness mirror, a 90°-beam deflfl ection mirror unit and various equipment for mounting and alignment. The calibration laser interferometers allow the accurate, dynamic measurement of the properties of linear guides during the assembly and alignment as well as the standardized calibration of machine axes. The measuring and calibration processes can be synchronized with a machine controller. Different triggering options for data acquisition are available. The measured values are transferred to a computer via a fast USB interface. Optional interfaces are available.
Major Performance Features
• Simultaneous, three-channel length, pitch and yaw angle measurement as well as straightness measure- ment with highest accuracy
• Fast, simple, robust and reliable
• Beam deflfl ection with an adjustable deflfl ection mirror
• Fiber-coupled sensor head and integrated beam direction detection allows easy handling and alignment
• High precision angle measurements
• The same laser frequency is used in all three length measurement channels
Measuring principle for SP 15000 C5
Applications
• Calibration of high-precision axes in measuring and ma- chine tools, as well as coordinate measuring instruments
• Fast and easy alignment of linear guides
• Laserinterferometric measurements on linear guides and translation stages
• Ultraprecise simultaneous length and angle measure- ment
• Differential measurements
Technical Data
Model SP 15000 C3
Model SP 15000 C5
Length measurement: Measuring range (on request up to 50 m)
Resolution
15 m
< 20 pm
15 m
< 20 pm
Angle measurement: Measuring ranges of pitch + yaw angles
Resolution
± 5°
< 0.0004 arcsec
± 5°
< 0.0004 arcsec
Straightness measurement:
Measuring range, lateral
Resolution
Axial range (freely selectable)
-
-
-
± 4 mm
10 nm
0.1. 6.5 m
Measuring uncertainty - Length measurement under stable - Angle measurement
conditions: - Straightness measurement
0.12 ppm
± 0.015% ± 0.0085 arsec
± 0.1% ± 0.1·M2 ± 0.1µm
Beam separation (horizontal and vertical)
50 mm
Maximum velocity of the measuring reflector
500 mm/s
Wavelength of the HeNe laser
632,8 nm
Frequency stability of the HeNe laser
2 ∙ 10-8
HeNe laser warm-up time
< 20 min
Operating temperature range
15...30°C
Dimensions (LxWxH)
Sensor head with adjustable mount
Reflector unit / Straightness mirror
Electronic supply and evaluation unit
[192 x 192 x 122] mm
[104 x 56 x 104] mm / -
[450 x 400 x 150] mm
[192 x 192 x 122] mm
[104 x 62 x 104] / [234 x 43 x 49] mm
[450 x 400 x 150] mm
Mass
Sensor head with adjustable mount
Reflector unit / Straightness mirror
lectronic supply and evaluation unit
3.4 kg
0.8 kg / -
9.4 kg
3.5 kg
0.93 kg / 0.98 kg
11.7 kg
Cable length between sensor head and electronic module (separable)
6 m, optional up to 10 m
Line voltage / frequency
100...240 VAC / 47...60 Hz
Laser safety class according to EN 60825-1/ANSI Z136.1 (CDRH)
2M / II
SIOS-Calibration software InfasAXIS
The combination of the optionally available software package InfasAXIS with the calibration interferometer SP 15000 C5 allows the calibration of machine tools, positioning tables etc. in 5 degrees of freedom: position, pitch and yaw angle and straightness in horizontal and vertical direction.
• Database for management of customer and measurement data
• Confifi guration of measurement (sequence control)
• Export and import of calibration data
• Customer projects for the specififi c measurement tasks
• Selection of the standard: VDI/DGQ 3441, DIN ISO 230 or VDI 2617
• Output of the calibration protocol
SIOS-Calibration software InfasMTCAL
Main features:
• Calibration, error mapping and verififi cation
• Online, dwell time and trigger mode
• CNC control support for Siemens, FANUC, Heiden- hain, BoschRexroth, Fagor, Fidia,
• Evaluation according ISO 230, ISO 10360, DGQ3441, ASME
SIOS-Alignment software InfasALIGN
In combination with the optionally available software InfasALIGN the calibration interferometer SP15000 C becomes an essential measuring tool for highly accurate alignment and adjustment of machine components such as linear guides. No matter, if the measurement is done in automatic mode or by moving the sliding carriage by hand, the software always provides complete information about position, angle and straightness in seconds. The measured data can be saved and logged.