Nano Vibration Analyzer
NA-Series
Design and Operation
The Nano Vibration Analyzer is a fiber-coupled laserinterferometric vibrometer integrated in a precision technical microscope. It is excellently suitable for measurements of dynamic properties and static displacements of micro structures, MEMS and cantilevers. The flexible sample positioning in a wide range of 50 mm x 50 mm is achieved by the specific microscope set-up. The vibrating object can be watched on PC by means of an USB camera. Different objectives with magnifications of 10x and 50x are changeable. DC deflection measurements as well as spectral analysis up to a frequency of 5 MHz are possible. Amplitudes can be measured with sub-nanometer resolution. Operation and display of results employs a PC running specially developed data analysis software. This software allows the frequency analysis of vibrations, the triggered data acquisition and a script-controlled scanning of surface structures.
Applications
• Noncontacting vibration measurements on micro objects, MEMS and cantilevers
• Determining the vibrational spectrum
• Determining the vibrational shapes (planar vibrations)
• Determining the resonance frequencies
• Measurement of the static deflection of membranes and other microstructures
Major Performance Features
• High precision, noncontact vibration measurements on micro objects
• Flexible sample positioning
• Different changeable objectives (10x, 50x)
• USB camera for observation of measuring objects
• Fiberoptic coupling of the laser beam (eliminates thermal influences on measurement results)
• Application-specific configuration
• Includes FFT spectrum-analysis software
• Open interfaces for OEM software under Windows and Linux
Software for Windows - INFAS Vibro
• 3D display of planar vibrations
• Script-controlled measurement procedure
• Integrability into customized systems by TCP/IP
• Calculation of velocity and acceleration of vibrational motion
• Spectrum analysis
• Averaging of spectra
Digital data output – RE 10 High-speed evaluation card with buffered data output
• Measurable frequency range: 0 to 5 MHz
• Sampling frequency: up to 12.5 MHz
• Data record length: 256...65.536 values
• External trigger input
• RS 232C interface
• USB interface
Digital data output – DP 10 Fast data recording in conjunction with a PC plug-in card
• Sampling frequency: up to 12.5 MHz
• Data width: 36 Bit
• High-resolution FFT analysis is possible
• Support for the INFAS Vibro software for NI-PCI 6534 and NI-PCIe 6535 PC cards
Technical Data
Model NA
Amplitude resolution
pm
5
Wavelength
nm
632.8
Scan field range
mm
50 x 50
Microscope magnification
10 x
50 x
Visual field size
µm
650 x 500
130 x 100
Laser spot diameter
µm
< 10
< 2
Working distance
mm
~ 35
~ 10
Dimensions (L x W x H)
Microscope system incl. vibrometer
Electronic supply and evaluation unit
mm
mm
400 x 500 x 700
450 x 400 x 150
60 x 36 x 170
450 x 400 x 150
Mass
Microscope system incl. vibrometer
Electronic supply and evaluation unit
kg
kg
23
8
Line voltage / frequency
VAC/Hz
100...240 /47...60
Laser safety class according to EN 60825-1:2007 and
ANSI Z136.1 (CDRH)
2M
II