Optromix - CLS-5000
Shot Pulsed 193 nm, 248 nm, 308 nm (157 nm Custom) Excimer Laser
KEY FEATURES
High beam position stability
High beam pointing stability
High repetition rate
Magnetic switch generatorCompact size
Built-in Energy monitor
Energy stabilizationSpecifications
Parameter
ArF
KrF
XeCl
Wavelength (nm) 1
248
193
308
Maximum pulse energy (mJ)
25
15
12
Maximum repetition rate (Hz)
500
Pulse duration (ns)
11
12
12
Stability of pulse energy (sigma, %)
< 2
Beam size (at 1/e 2 of peak, V x H, mm)
6 x 3.5
6 x 4
6 x 4
Beam divergency (FWHM, V x H, mm)
1 x 1
Notes
1.Option wavelength 157 nm
Electrical / Mechanical / Environmental
Parameter
Optromix-CLS 5000
Weight
85 kg
Dimensions (L x W x H, mm)
887 x 336 x 454
Cooling
Water < 1 l/min
Power consumption
220V / 50Hz, 1 kW 1
Gas
1 premix cylinder
Control
RS 232, Windows
Notes
1. Option 110V / 60 Hz, 1000 VA
Warranty: Standard Warranty - 12 months from the date of delivery.
商品属性 [波长] 248/193/308nm [重复频率] 500Hz