Optromix - CLS-7000
KEY FEATURES
High pulse energy
Metal ceramic design
Long lifetime premix
Reliable thyratron switchBuilt-in Energy monitor
Energy stabilization
Air-cooled versions up to 20 HzSpecifications
Parameter
ArF
KrF
XeCl
Wavelength (nm) 1
193
248
308
Maximum pulse energy (mJ)
250
400
300
Maximum repetition rate (Hz)
CL 7020
CL 7050
CL 7100
20
50
100Pulse duration (ns)
17
20
20
Stability of pulse energy (sigma, %)
< 2
Beam size ( V x H, mm)
20 x 6
21 x 6
22 x 6
Beam divergency (FWHM, V x H, mm)
1.5 x 4.5 (stable resonator)
Average power (W)
CL 7020
CL 7050
CL 7100
5
15
25
8
20
35
6
15
25Preionization
spark
Notes
1.Option wavelength 157 nm
Electrical / Mechanical / Environmental
Parameter
Optromix-CLS 7000
Weight
170 kg
Dimensions (L x W x H, mm)
1423 x 375 x 760
Tube material
Metal and ceramic
Cooling
CL 7020
CL 7050
CL 7100
Air
Water < 1 l / min
Water < 3 l / minPower consumption
CL 7020
CL 7050
CL 7100
220 V, 50 Hz, 1.5 kW 1
220 V, 50 Hz, 1.8 kW 1
380V, 50 Hz, 3.5 kW 1Gas
1 premix cylinder
Control
RS 232, Windows
Notes
1. Option 110 V (220 V)/60 Hz
Warranty: Standard Warranty - 12 months from the date of delivery.
商品属性 [波长] 193/248/308nm [重复频率] 500Hz