SLM 266
Single longitudinal mode TEM00 beam profile Q-switched solid-state laser Wavelength 266 nm
General description
The SLM 266 is a single-frequency all-solid-state laser system for applications in the UV such as waver inspection, calibration of spectrometers and holographic applications. The spectral bandwidth of less than 80 MHz is near its theoretical Fourier limit.
The laser provides short output pulses with a duration of 8 - 10 ns in a diffraction-limited beam with M²<1.7 at repetition rates between 1 and 15 kHz. The average output power is more than 500 mW at 266 nm with ultra-stable pulse traces and a high coherence length of more than 1.8 m not presentable with conventional lasers.
Due to a cw single-frequency seed the consecutive laser pulses remain in phase to allow stable interference patterns, e.g. for exposing directly lithographic films. In addition the 500 mW average output power promise short exposure times for a high throughput.
This combination out of short 266 nm wavelength, 500 mW high average output power and single frequency emission is a unique feature combination for a solid state laser.
Product specifications
Model
SLM 266
Wavelength
266 nm
Average power
500 mW
Pulse duration (typ)
8-10 ns
Energy per pulse
50 µJ
Repetition rate
1-15 kHz
M²
< 1.7
Spectral bandwidth
< 80 MHz
Coherence length
> 1.8 m
* Data at 10 kHz pulse repetition rate. Specifications are subject to change without notice due to product improvement.
Applications
Spectrometer calibrationLithography
Interferometry
Wafer inspection
Holography
Photoluminescence
Raman spectroscopy
Metrology
Optional
Graphical user interface
LabVIEW libraries
CDRH complience shutter
Typical performance
Typical beam profile
Dimensions laser head
System dimensions (L x W x H), weight
Laser head
635 x 536 x 154 mm³
54 kg
Power supply (including chiller)
600 x 600 x 600 mm³
78 kg
Electrical characteristics
Operating voltage
85-264 VAC
Frequency
47-63 Hz
Power consumption
650 W typ
商品属性 [波长] 266 nm [功率] 500 mW [脉宽] 8-10 ns [重复频率] 1-15 kHz