SLM 355
Single longitudinal mode TEM00 beam profile Q-switched solid-state laser Wavelength 355 nm
General description
The SLM 355 is a single-frequency all-solid-state laser system for applications in the UV such as optical metrology, calibration of spectrometers and holographic applications. The spectral bandwidth of less than 60 MHz is near its theoretical Fourier limit.
The laser provides short output pulses with a duration of 10 - 12 ns in a diffraction-limited beam with M²<1.3 at repetition rates between 1 and 15 kHz. The average output power is more than 2 W at 355 nm with ultra-stable pulse traces and a high coherence length of more than 2.5 m not presentable with conventional lasers.
Due to a cw single-frequency seed the consecutive laser pulses remain in phase to allow stable interference patterns, e.g. for exposing directly lithographic films. In addition the 2 W average output power promise short exposure times for a high throughput.
This combination out of short 355 nm wavelength, 2 W average output power and single frequency emission is a unique feature combination for a solid state laser.
Product specifications
Model
SLM 355
Wavelength
355 nm
Average power
2 W
Pulse duration (typ)
10-12 ns
Energy per pulse
200 µJ
Repetition rate
1-15 kHz
M²
< 1.3
Spectral bandwidth
< 60 MHz
Coherence length
> 2.5 m
* Data at 10 kHz pulse repetition rate. Specifications are subject to change without notice due to product improvement.
Applications
Interferometry
Raman spectroscopy
Holography
Spectrometer calibration
Metrology Lithography
Optional
Graphical user interface
LabVIEW libraries
CDRH complience shutter
Typical performance
Typical beam profile
Dimensions laser head
System dimensions (L x W x H), weight
Laser head
635 x 461 x 154 mm³
46 kg
Power supply (including chiller)
600 x 600 x 600 mm³
78 kg
Electrical characteristics
Operating voltage
85-264 VAC
Frequency
47-63 Hz
Power consumption
650 W typ
商品属性 [波长] 355 nm [功率] 2 W [脉宽] 10-12 ns [重复频率] 1-15 kHz