P-721 PIFOC® Piezo Flexure Objective Scanner
Fast Nanopositioner and Scanner for Microscope Objectives
• Scans and positions objectives with sub-nm resolution
• Travel ranges to 140 µm, millisecond settling time
• Significantly faster response and higher lifetime than motorized Z stages
• Parallel precision flexure guiding for better focus stability
• Direct metrology with capacitive sensors for highest linearity
• Cost-efficient version with SGS sensors
• Compatible with MetaMorph imaging software
• Outstanding lifetime due to PICMA® piezo actuators
• QuickLock thread adapter for easy attachment
• Clear aperture up to 29 mm Ø
Specifications
P-721.CLQ P-721.CDQ
P-721.CDAP-721.SL2
P-721.SDAP-721.0LQ Units Tolerance Active axes Z Z Z Z Motion and positioning Integrated sensor Capacitive Capacitive SGS - Open-loop travel,
-20 to +120 V
140 140 140 140 µm min. (20 % / -0 %) Closed-loop travel 100 100 100 - µm Open-loop resolution 0.5 0.5 0.5 0.5 nm typ. Closed-loop resolution 0.7 0.7 5 - nm typ. Closed-loop linearity
error
0.03 0.03 0.2 - % typ. Repeatability ±5 ±5 ±10 - nm typ. Runout θX, θY 13 13 13 13 µrad typ. Crosstalk X, Y 100 100 100 100 nm typ. Mechanical properties Stiffness in motion
direction
0.3 0.3 0.3 0.3 N/µm ±20 % Unloaded resonant frequency 580 580 580 550 Hz ±20 % Resonant frequency
@ 120 g
235 235 235 235 Hz ±20 % Resonant frequency
@ 200 g
180 180 180 180 Hz ±20 % Push / pull force capacity
in motion direction
100 / 20 100 / 20 100 / 20 100 / 20 N max. Drive properties Ceramic type PICMA® P-885 PICMA® P-885 PICMA® P-885 PICMA® P-885 Electrical capacitance 3.1 3.1 3.1 3.1 µF ±20 % Dynamic operating
current coefficient
3.9 3.9 3.9 3.9 µA/(Hz × µm) ±20 % Miscellaneous Operating temperature
range
-20 to 80 -20 to 80 -20 to 80 -20 to 80 °C Material Aluminum Aluminum Aluminum Aluminum Mass 0.24 0.24 0.22 0.22 kg ±5 % Objective diameter 39 39 39 39 mm max. Cable length 1 1 1 1 m ±10 mm Sensor / voltage connection
LEMO Sub-D Special LEMO /
Sub-D Special
LEMO
(no sensor)
Recommended controller
/ amplifier
E-610 servo controller /
amplifier, E-500 modular
piezo controller system
with E-505 amplifier
module (high performance)
and E-509 servo controller
E-625 servo controller,
bench-top, E-665
powerful servo controller,
bench-top Single-channel
digital controllers: E-753
(bench-top), E-709
SL2-version:
E-610 servo controller
/ amplifier, E-625 servo
controller, bench-top,
E-665 powerful servo
controller, bench-top
SDA version:
E-709 single-channel
digital controller
E-610 servo
controller /
amplifier
The resolution of PI piezo nanopositioners is not limited by friction or stiction. Value given is noise equivalent motion with E-503 amplifier.
Ask about custom designs!
Ordering Information
P-721.CLQ
Fast PIFOC® Piezo Nanofocusing Z Drive, 100 µm, Direct Metrology, Capacitive Sensor, LEMO Connector(s),
for QuickLock Thread Adapters
P-721.SL2
Fast PIFOC® Piezo Nanofocusing Z Drive, 100 µm, SGS Sensor, LEMO Connector(s), for QuickLock Thread Adapters
P-721.0LQ
Fast PIFOC® Piezo Nanofocusing Z Drive, 100 µm, Open-Loop, LEMO Connector(s), for QuickLock Thread Adapters
P-721.CDA
Fast PIFOC® Piezo Nanofocusing Z Drive, 100 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s),
for Large Aperture QuickLock Thread Adapters
P-721.SDA
Fast PIFOC® Piezo Nanofocusing Z Drive, 100 µm, SGS Sensor, Sub-D Connector(s), for Large Aperture QuickLock
Thread Adapters
P-721.CDQ
Fast PIFOC® Piezo Nanofocusing Z Drive, 100 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s), for
QuickLock Thread Adapters
商品属性 [主动轴] Z [行程] Open-loop:140µm;Closed-loop:100µm/- [集成传感器] Capacitive/SGS/- [刚性] 0.3N/µm [工作温度] -20 to 80℃ [分辨率] Open-loop:0.5nm;Closed-loop:0.7nm/5nm/- [压电陶瓷] PICMA® P-885