P-726 PIFOC® High-Load Objective Scanner
High-Dynamics Piezo Z Scanner for Heavy Objectives
• High-dynamics positioning and scanning for large
objectives
• Resonant frequency 1120 Hz, 560 Hz with 210 g load
• Typical Step-and-settle about 6 ms
• Travel range 100 µm
• Direct-metrology capacitive sensors for best linearity,
stability and control dynamics
• Resolution to 0.3 nm
• Frictionless, high-precision flexure guiding system for
better focus stability
Technical Data
P-726.1CD
Tolerance
Active axes
Z
Motion and positioning
Integrated sensor
Capacitive, direct metrology
Closed-loop travel
100 µm
calibrated
Closed-loop resolution
0.4 nm
typ.
Open-loop resolution
0.3 nm
typ.
Linearity, closed-loop
0.02 %
typ.
Repeatability
±3 nm
typ.
Runout UX, UY
±5 µrad
typ.
Crosstalk X, Y
50 nm
typ.
Mechanical properties
Stiffness in motion direction
3.4 N/µm
±20 %
Unloaded resonant frequency
1120 Hz
±20 %
Resonant frequency under load
560 Hz @ 210 g
±20 %
Resonant frequency under load
480 Hz @ 310 g
±20 %
Push/pull force capacity in motion direction
100 / 50 N
Max.
Drive properties
Piezo ceramic type
PICMA® P-885
Electrical capacitance
6 µF
±20 %
Dynamic operating current coefficient
7.5 µA/(Hz • µm)
±20 %
Miscellaneous
Operating temperature range
-20 to 80 °C
Material
Aluminum, steel
Dimensions
Diameter: 65 mm, Height: 50.7 mm
Max. objective diameter
M32
Mass
575 g
±5 %
Cable length
1.5 m
±10 mm
Sensor / voltage connection
Sub-D Special
Recommended controller / amplifier
Single-channel digital controller:E-753 (bench-top)
E-625 bench-top controller
E-665 high-power bench-top controller
E-500 modular piezo controller system with E-505 high-power amplifier module
and E-509 servo-controller
System properties
System configuration
E-500 modular piezo controller system with E-505 high-power amplifier module
and E-509 servo-controller 310 g load (objective mass)
Closed-loop amplifier bandwidth,
small signal, 10 µm
130 Hz Closed-loop amplifier bandwidth,
large signal
70 Hz
Ordering Information
P-726.1CD High-Dynamics PIFOC® Piezo Nanofocusing Z Drive, 100 µm, Capacitive Sensor
商品属性 [主动轴] Z [行程] Closed-loop: 100 µm [集成传感器] Capacitive, direct metrology [刚性] 3.4N/µm [工作温度] -20 to 80 °C [分辨率] Open-loop:0.3nm;Closed-loop:0.4nm [压电陶瓷] PICMA® P-885