P-725.xDD PIFOC® High-Dynamics Piezo Scanner
Nanopositioning and Scanning System for Microscope Objectives
• Fastest settling time under 5 ms with microscope objective
• Travel range 18 µm
• Scans and positions objectives with sub-nm resolution
• Parallel flexure guiding for minimized objective offset
• Direct metrology with capacitive sensors for highest linearity
• Cost-efficient version with SGS sensors
• Compatible with Metamorph™ imaging software
• Outstanding lifetime due to PICMA® piezo actuators
• QuickLock Thread Adapters for easy attachment
Specifications
P-725.CDD
P-725.SDD
Units
Tolerance
Active axes
Z
Z
Motion and positioning
Integrated sensor
Capacitive
SGS
Open-loop travel, -20 to +120 V
18
18
µm
min. (20 % / -0 %)
Closed-loop travel
18
18
µm
Open-loop resolution
0.2
0.2
nm
typ.
Closed-loop resolution
0.2
0.2
nm
typ.
Closed-loop linearity error
0.04*
0.5
%
typ.
Repeatability
±1.5
±5
nm
typ.
Runout θX, θY 2
2
µrad
typ.
Crosstalk in X, Y
150
150
nm
typ.
Mechanical properties
Stiffness in motion direction
1.5
1.5
N/µm
±20 %
Resonant frequency, no load
1180
1180
Hz
±20 %
Resonant frequency, under load, @ 200 g
450
450
Hz
±20 %
Push / pull force capacity in motion direction
100 / 20
100 / 20
N
max.
Drive properties
Ceramic type
PICMA® P-887
PICMA® P-887
Electrical capacitance
3.1
3.1
µF
±20 %
Dynamic operating current coefficient
19.4
19.4
µA/(Hz × µm)
±20 %
Miscellaneous
Operating temperature range
-20 to 80
-20 to 80
°C
Material
Aluminum
Aluminum
Mass
0.21
0.2
kg
±5 %
Cable length
1.5
1.5
m
±10 mm
Sensor / voltage connection
Sub-D Special
LEMO
* Recommended controllers:
E-610 servo controller / amplifier, E-625 servo controller, bench-top, E-665 powerful servo controller, bench-top
E-753 digital piezo controller, 1 channel, bench-top device
With E-753 digital controller. Non-linearity of direct drive stages measured with analog controllers is up to 0.1 % typ.
Single-channel digital controller: E-753 (bench-top)
Ask about custom designs
Ordering Information
P-725.CDD Fast PIFOC® Piezo Nanofocusing Z Drive, 18 µm, Capacitive Sensor, Sub-D Connector(s), for QuickLock Thread Adapters
P-725.SDD Fast PIFOC® Piezo Nanofocusing Z Drive, 18 µm, SGS Sensor, LEMO Connector(s), for QuickLock Thread Adapters
商品属性 [主动轴] Z [行程] 18µm [集成传感器] Capacitive/SGS [刚性] 1.5N/µm [工作温度] -20~80℃ [分辨率] 0.2nm [压电陶瓷] PICMA® P-887