A-62x PIglide RM Rotation Stage with Air Bearing
Friction-Free, Ideal for Indexing, Positioning, Scanning, Measuring Technology
• Cleanroom compatible • Table diameters from 50 mm to 300 mm • Load capacity up to 4170 N
• Eccentricity and flatness < 200 nm • Can be mounted vertically or horizontally
PIglide motorized rotation stage
The PIglide® RM series of motorized rotation stages are designed for accuracy, precision, high stiffness, and ease of use, and can be mounted in any orientation.
Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning.
The RM stages offer superior runout, flatness, and wobble performance. Because they are friction free and require no maintenance or lubrication, they are ideal for use in cleanrooms.
3-phase torque motor
Brushless
Slotless
Low cogging torque
Absolute encoder (optional)
Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation.
Accessories and options
Encoder
Optional tip/tilt platform
Custom mounting flanges
Vacuum feedthrough
Slip rings
PIglide filter and air preparation kit
Single or multi-axis motion controllers and servo drives
Base plates made of granite and systems for reducing vibration
Application fields
Optical adjustment, metrology, inspection systems, calibration, scanning.
specifications
A-621.025 A-623.025 A-623.050 A-624.050 A-627.075 Unit Tolerance Motion and positioning
Travel range
Unlimited, > 360°
Unlimited, > 360°
Unlimited, > 360°
Unlimited, > 360°
Unlimited, > 360°
Table Diameter
50
100
100
150
300
mm
Bearing length
25
25
50
50
75
mm
Eccentricity
±200
±100
±100
±50
±50
nm
max.
Flatness*
±200
±100
±100
±50
±50
nm
max.
Wobble*
9
4
4
2
1.5
μrad
max.
Mechanical properties
Load capacity, axial
134
536
536
1206
4244
N
max.
Load capacity, radial
57
115
229
344
1203
N
max.
Load torque MX,Y
0.57
1.7
4.52
22.6
141.3
N·m
max.
Axial stiffness
26
96
96
210
788
N/µm
Radial stiffness
8
18
35
64
204
N/µm
Moment of inertia
125
1485
1530
8790
210850
kg·mm²
Moved mass
0.4
1.2
1.4
3.2
21.5
kg
Overall mass
1
3.5
4.5
10
50
kg
Guide type
Air bearing
Air bearing
Air bearing
Air bearing
Air bearing
Drive properties
Drive type
Torque motor, 3-phase,
brushless,
ironless, slotless
Torque motor, 3-phase,
brushless,
ironless, slotless
Torque motor, 3-phase,
brushless,
ironless, slotless
Torque motor, 3-phase,
brushless,
ironless, slotless
Torque motor, 3-phase,
brushless,
ironless, slotless
Intermediate circuit voltage, effective
48, nominal
80, max.
48, nominal
80, max.
48, nominal
80, max.
48, nominal
80, max.
48, nominal
80, max.
V DC
Peak torque
0.21
2.1
2.1
4.71
8.46
N·m
typ.
Nominal torque
0.07
0.7
0.7
1.57
2.82
N·m
typ.
Force constant, effective
0.03
0.26
0.26
0.59
0.61
N·m/A
typ.
Resistance phase-phase
2.7
4.2
4.2
6.7
4.5
Ω
Inductivity phase-phase
0.1
0.4
0.4
0.9
0.6
mH
Back EMF phase-phase
4.1
31.8
31.8
71
74
V/kRPM
max.
A-62x.xxxAx A-62x.xxxBx A-62x.xxxCx Integrated sensor
Incremental angle measuring system
Absolute-measuring angle measuring system
Incremental angle measuring system
Sensor signal
Sin/cos, 1 V peak-peak
BiSS-C
A/B quadrature, TTL
Lines/revolution
A-621: 8192
A-623: 15744
A-624: 23600
A-627: 47200
–
A-621: 8192
A-623: 15744
A-624: 23600
A-627: 47200
Velocity**
A-621: 2500 rpm max.
A-623: 1200 rpm max.
A-624: 600 rpm max.
A-627: 500 rpm max.
A-621: 2500 rpm max.
A-623: 1200 rpm max.
A-624: 600 rpm max.
A-627: 500 rpm max.
A-621: 550 rpm max.***
A-623: 300 rpm max.***
A-624: 175 rpm max.***
A-627: 75 rpm max.***
Sensor resolution
A-621: 0.19 µrad****
A-623: 0.1 µrad****
A-624: 0.06 µrad****
A-627: 0.03 µrad****
A-621: 0.0015 µrad
A-623: 0.0015 µrad
A-624: 0.0015 µrad
A-627: 0.0015 µrad
A-621: 1.94 µrad#
A-623: 1.02 µrad#
A-624: 0.68 µrad#
A-627: 0.33 µrad#
Bidirectional repeatability
± 4.8 µrad
± 4.8 µrad
± 4.8 µrad
Accuracy, with error compensation##
± 7.3 µrad
± 7.3 µrad
± 7.3 µrad
Reference point switch
1 / revolution, differential pulse over one sensor signal period, 1 V peak-peak
–
1 / revolution, one count over one step of the encoder, synchronized to output signal
A-62x Operating pressure###
75 to 85 psi (515 to 585 kPa)
Air consumption
< 2 SCFM (56 SLPM)
Air quality
Clean (filtered to 1.0 μm or better) - ISO 8573–1 Class 1
Oil free - ISO 8573–1 Class 1
Dry (-15 °C dew point) - ISO 8573–1 Class 3
Materials####
Hardcoat aluminum, stainless steel fasteners
* Depending on the quality of the underlying surface, the payload, orientation, and forces that act on the stage from the outside. Please contact PI for application-specific parameters. The specified values are static (no rotary motion during measuring) and without load.
** Can be limited by imbalance of the payload or the controller and the drive.
*** Assumes a sampling rate of 50 MHz.
**** Assumes 4096-fold interpolation. Contact PI for the use of other factors.
# Uses 400-fold interpolation. Alternative digital encoder resolutions on request. Please contact PI for a quote.
## The specified values are based on error compensation controlled by the controller. The stage must be ordered with a controller from PI to reach these values. Accuracy values assume short-term time duration and do not consider the long-term effects of thermal drift on the stage.
### To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.
#### Customer-specific materials such as rust-free steel on request. Please contact PI for a quote.
Ordering Information 50 mm Diameter
A-621.025A1
PIglide RM Rotation Stage, Air Bearings, 50 mm Diameter, 25 mm Bearing Length, Angle Measuring System with Sin/Cos Signal
Transmission, 8192 Lines/Revolution, Brushless 3-PhaseTorque Motor
A-621.025B1
PIglide RM Rotation Stage, Air Bearings, 50 mm Diameter, 25 mm Bearing Length, Absolute-measuring Angle Measuring System, 0.0015
µrad Sensor Resolution, Brushless 3-Phase Torque Motor
A-621.025C1
PIglide RM Rotation Stage, Air Bearings, 50 mm Diameter, 25 mm Bearing Length,Angle Measuring System with A/B Quadrature Signal
Transmission, 1.94 µrad Sensor Resolution, Brushless 3-Phase Torque Motor
100 mm Diameter
A-623.025A1
PIglide RM Rotation Stage, Air Bearings, 100 mm Diameter, 25 mm Bearing Length, Angle Measuring System with Sin/Cos Signal
Transmission, 15744 Lines/Revolution, Brushless 3-Phase Torque Motor
A-623.025B1
PIglide RM Rotation Stage, Air Bearings, 100 mm Diameter, 25 mm Bearing Length, Absolute-measuring Angle Measuring System, 0.0015
µrad Sensor Resolution, Brushless 3-Phase Torque Motor
A-623.025C1
PIglide RM Rotation Stage, Air Bearings, 100 mm Diameter, 25 mm Bearing Length, Angle Measuring System with A/B Quadrature Signal
Transmission, 1.02 µrad Sensor Resolution, Brushless 3-Phase Torque Motor
A-623.050A1
PIglide RM Rotation Stage, Air Bearings, 100 mm Diameter, 50 mm Bearing Length, Angle Measuring System with Sin/Cos Signal
Transmission, 15744 Lines/Revolution, Brushless 3-Phase Torque Motor
A-623.050B1
PIglide RM Rotation Stage, Air Bearings, 100 mm Diameter, 50 mm Bearing Length, Absolute-measuring Angle Measuring System, 0.0015
µrad Sensor Resolution, Brushless 3-Phase Torque Motor
A-623.050C1
PIglide RM Rotation Stage, Air Bearings, 100 mm Diameter, 50 mm Bearing Length, Angle Measuring System with A/B Quadrature Signal
Transmission, 1.02 µrad Sensor Resolution, Brushless 3-Phase Torque Motor
150 mm Diameter
A-624.050A1
PIglide RM Rotation Stage, Air Bearings, 150 mm Diameter, 50 mm Bearing Length, Angle Measuring System with Sin/Cos Signal
Transmission, 23600 Lines/Revolution, Brushless 3-Phase Torque Motor
A-624.050B1
PIglide RM Rotation Stage, Air Bearings, 150 mm Diameter, 50 mm Bearing Length, Absolute-measuring Angle Measuring System, 0.0015
µrad Sensor Resolution, Brushless 3-Phase Torque Motor
A-624.050C1
PIglide RM Rotation Stage, Air Bearings, 150 mm Diameter, 50 mm Bearing Length, Angle Measuring System with A/B Quadrature Signal
Transmission, 0.68 µrad Sensor Resolution, Brushless 3-Phase Torque Motor
300 mm Diameter
A-627.075A1
PIglide RM Rotation Stage, Air Bearings, 300 mm Diameter, 75 mm Bearing Length, Angle Measuring System with Sin/Cos Signal
Transmission, 47200 Lines/Revolution, Brushless 3-Phase Torque Motor
A-627.075B1
PIglide RM Rotation Stage, Air Bearings, 300 mm Diameter, 75 mm Bearing Length, Absolute-measuring Angle Measuring System, 0.0015
µrad Sensor Resolution, Brushless 3-Phase Torque Motor
A-627.075C1
PIglide RM Rotation Stage, Air Bearings, 300 mm Diameter, 75 mm Bearing Length, Angle Measuring System with A/B Quadrature Signal
Transmission, 0.33 µrad Sensor Resolution, Brushless 3-Phase Torque Motor
商品属性 [主动轴] [行程] Unlimited, > 360° [电机类型] Torque motor,3-phase,brushless,ironless, slotless [刚性] Axial:26N/µm;Radial:8N/µm