EB系列强化版探针台
优化的零件重心配置达到机台的最大稳固 通用于DC直流及RF射频具有点针卡加装功能, ,吸盘独特低重心同轴滑台使机台重心跟着下压而达到稳固,独特XY旋钮一上一下配置,方便XY快速切换,使元件达到快速25mm/转及精细10micron调整的方便性。
Specifications:
Chuck Up/Down Available
显微镜 X-Y 滑台
同轴式吸盘滑台
供应到12英寸吸盘机型
The EB series is our flagship probe station product line. It’s features and foundation are solid for providing repeatable, accurate measurements in both DC and RF applications. :
Features
- Low profile coaxial-driven style stage(optional large knob precision stage)
- Back-lash free movement
- Mounting for 12 micropositioners
- 4.5” Probe Card Holder compatible
- Micropositioner Standby Dock
- Microscope Tilting for E-Z lens switchingApplications
- Basic IV/CV
- RF, Single Broadband Probing
- High Voltage, High Current
Accessories
- Hot Chuck with Temperature Controller
- Vibration Free Table
- Shielding Box
Station Specifications
Station Footprint
580 mm W x 460 mm D
Station Height
450 mm (to Platen)/700 mm (to Microscope)
Station Weight
60 kg
Platen Material
Hard Chrome Plated Steel
Platen Dimension
250 mm Inner, 450mm Outer
Platen Capacity
12 DC or 4 RF 4 DC
Positioner Mount
Magnetic ON/OFF Switch
No. of Vacuum Switches
4
Chuck Material
Stainless Steel
Chuck Stage Type
Coaxial (Large Knob Optional)
Chuck Travel Range
6” x 6”
Chuck Quick Resolution
25 mm/rev
Chuck Fine Resolution
1 µm
Chuck Theta Coarse Travel
360˚
Chuck Theta Fine Resolution
0.01˚
Chuck Z-Motion
4 mm Range
Chuck Z Fine Resolution
1 µm
Coaxial Chuck Movement
Bevelled Gear and Rack 0.8mm Pitch
Large Knob Chuck Movement
High Precision Linear Stage
Chuck Size
6” (150 mm)
Chuck Planarity
3 µm
Chuck Rigidity
15 µm / 10 N @ edge
Chuck Vacuum Grooves
Center, 1.5”, 3” ,5” (Individually Controlled)
Chuck Bias Capacity
Up to 2 kV
Chuck Isolation
5 GK
DUT Size Range
2 mm - 150 mm
Microscope Stage Type
High Precision Linear
Stage Microsope Stage Resolution
1 µm
Microscope Stage Travel Range
2” x 2”
Microscope Tilting (Optional)
35˚
Microscope Zoom Range
1x - 5x
Microscope Eye Piece
20x
Microscope Magnification Range
20x-100x
Micropositioner Options
All micropositioners oer X-Y-Z linear-motion travel with no backlash with mounting options including magnet, vacuum or magnet switch
EB-050
Resolution: 0.8 µm
Screw Resolution: 212 µm
Travel Range: Linear 12 mm X-Y-Z
Dimensions: 52 mm W x 96 mm D x 76 mm H
Weight: 550 g
Use For: DC/RF CapableEB-700
Resolution: 2 μm
Screw Resolution: 630 µm
Travel Range: Linear 12 mm X-Y-Z
Dimensions: 38 mm W x 62 mm D x 45 mm H
Weight: 200 g
Used For: DC OnlyEB-005
Resolution: 0.3 μm
Screw Resolution: 125 µm
Travel Range: Linear 12 mm X-Y-Z
Dimensions: 90 mm W x 130 mm D x 90 mm H
Weight: 1000 g
Used For: DC/RF Capable
Vibration Free Table Option
VFT-3636
Dimension: 36” W x 36” D x 36” H
Vertical Natural Frequency: 1.5 Hz
Isolation Eiciency: @ 5 Hz 85%
Horizontal Natural Frequency: 1.2 Hz
Isolation Eiciency: @ 5 Hz 91%
Air Requirement: 80 psi
Net Load: 200 kg
Material: Stainless Steel TableTop
商品属性 [Chuck Stage] Coaxial (Large Knob Optional) [Platen] Hard Chrome Plated Steel [Microscope Stage] High Precision Linear