BD系列豪华版探针台
平台快速及微调1micron重复性的上下功能,搭配点针卡加功能可作元件Die Stepping的Die To Die应用,晶圆吸盘配置独特超大XY旋钮配置增加握感,使元件达到快速25mm/转及精细调整10micrn重复性,广受半导体厂及IC设计公司好评
Specifications:
平台上下可调
显微镜X-Y滑台
大旋钮精密滑台
供应到12英寸吸盘机型
The BD series is our top of the line probe station. It’s features and foundation are solid for providing repeatable, accurate measurements in both DC and RF applications. :
Features
- Large Knob High Precision Stage
- Back-lash free movement
- Mounting for 12 micropositioners
- 4.5” Probe Card Holder compatible
- Platen Height Adjustable
- Micropositioner Standby Dock
- Microscope Tilting for E-Z lens switchingApplications
- Basic IV/CV
- RF, Single Broadband Probing
- High Voltage, High Current
Accessories
- Hot Chuck with Temperature Controller
- Vibration Free Table
- Shielding Box
Station Specifications
Station Footprint
760 mm W x 660mm D
Station Height
450 mm (to Platen)/700 mm (to Microscope)
Station Weight
80kg
Platen Material
Hard Chrome Plated Steel
Platen Dimension
250 mm Inner, 450mm Outer
Platen Capacity
12 DC or 4 RF 4 DC
Positioner Mount
Magnetic ON/OFF Switch
No. of Vacuum Switches
4
Platen Z-Motion Range
Platen Z-Fine Resolution
1 µm
Platen Z Movement
Gear and Belt (Fine), Lever (Coarse)
Chuck Material
Stainless Steel
Chuck Stage Type
Large Knob Precision Movement
Chuck Travel Range
6” x 6”
Chuck Quick Movement
Quick Y Rail Movement for Easy Sample Loading
Chuck Fine Resolution
1 µm
Chuck Theta Coarse Travel
360˚
Chuck Theta Fine Resolution
0.01˚
Large Knob Chuck Movement
High Precision Linear Stage
Chuck Size
6” (150 mm)
Chuck Planarity
3 µm
Chuck Rigidity
15 µm / 10 N @ edge
Chuck Vacuum Grooves
Center, 0.5”, 1.5” ,2.5” (Individually Controlled)
Chuck Bias Capacity
Up to 2 kV
Chuck Isolation
5 GK
DUT Size Range
2 mm - 150 mm
Microscope Stage Type
High Precision Linear Stage
Microsope Stage Resolution
1 µm
Microscope Stage Travel Range
2” x 2”
Microscope Tilting (Optional)
5˚
Microscope Zoom Range
1x - 5x
Microscope Eye Piece
20x
Microscope Magnification Range
20x-100x
Micropositioner Options
All micropositioners oer X-Y-Z linear-motion travel with no backlash with mounting options including magnet, vacuum or magnet switch
EB-050
Resolution: 0.8 µm
Screw Resolution: 212 µm
Travel Range: Linear 12 mm X-Y-Z
Dimensions: 52 mm W x 96 mm D x 76 mm H
Weight: 550 g
Use For: DC/RF CapableEB-700
Resolution: 2 μm
Screw Resolution: 630 µm
Travel Range: Linear 12 mm X-Y-Z
Dimensions: 38 mm W x 62 mm D x 45 mm H
Weight: 200 g
Used For: DC OnlyEB-005
Resolution: 0.3 μm
Screw Resolution: 125 µm
Travel Range: Linear 12 mm X-Y-Z
Dimensions: 90 mm W x 130 mm D x 90 mm H
Weight: 1000 g
Used For: DC/RF Capable
Vibration Free Table Option
VFT-3636
Dimension: 36” W x 36” D x 36” H
Vertical Natural Frequency: 1.5 Hz
Isolation Eiciency: @ 5 Hz 85%
Horizontal Natural Frequency: 1.2 Hz
Isolation Eiciency: @ 5 Hz 91%
Air Requirement: 80 psi
Net Load: 200 kg
Material: Stainless Steel TableTop
商品属性 [Chuck Stage] Large Knob Precision Movement [Microscope Stage] High Precision Linear Stage