STANDARD FEATURES
LINEAR WORKING ENVELOPE:
15mm CUBE
MAXIMUM Z STROKE:
25mm
PITCH, YAW, ROLL RANGE:
+/- 20 degrees
DEFINED AT X=0, Y=0, & Z=MIDSTROKE
MOTORS:
(6) HR-2 CERAMIC SERVO
FORCE, STANDARD:
48 N
HEXAPOD SPEED:
200mm/sec
ENCODERS:
(6) LINEAR OPTICAL
ENCODER OUTPUT:
ANALOG 1 VOLT, PEAK TO PEAK
ENCODER RESOLUTION:
5nm
BEARINGS:
PRECISION CROSSED ROLLER & PRECISION SPHERICAL JOINT
STRUCTURE:
ALUMINUM 6061-T6
ENVIRONMENT:
STANDARD, CLEAN ROOM, VACUUM 10e-7 TORR, AND VACUUM 10e-10 TORR
TEMPERATURE:
0 to 50 ℃
HUMIDITY:
10% to 80% NON-CONDENSING
TOTAL MASS:
2.0 kg
MOVING MASS:
0.5 kg
INCLUDED EQUIPMENT
MOTION CONTROLLERS (DELTA TAU)
MOTOR AMPLIFIERS
SOFTWARE AND LICENSE
商品属性 [行程] 25mm [工作温度] 0-50℃ [分辨率] 5nm