STANDARD FEATURES
LINEAR WORKING ENVELOPE:
28mm CUBE
MAXIMUM Z STROKE:
55mm
PITCH, YAW, ROLL RANGE:
+/- 18 degrees
DEFINED AT X=0, Y=0, & Z=MIDSTROKE POSITION
MOTORS:
(12) HR-4 CERAMIC SERVO
FORCE, STANDARD:
192 N
HEXAPOD SPEED:
200mm/sec
ENCODERS:
(6) LINEAR OPTICAL
ENCODER OUTPUT:
ANALOG 1 VOLT, PEAK TO PEAK
ENCODER RESOLUTION:
5nm
BEARINGS:
PRECISION CROSSED ROLLER & PRECISION SPHERICAL JOINT
STRUCTURE:
ALUMINUM 6061-T6
ENVIRONMENT:
STANDARD, CLEAN ROOM, VACUUM 10e-7 TORR, AND VACUUM 10e-10 TORR
TEMPERATURE:
0 to 50 ℃
HUMIDITY:
10% to 80% NON-CONDENSING
TOTAL MASS:
8.8 kg
MOVING MASS:
2.3 kg
INCLUDED EQUIPMENT
MOTION CONTROLLERS (DELTA TAU)
MOTOR AMPLIFIERS
SOFTWARE AND LICENSE
商品属性 [行程] 55mm [工作温度] 0 to 50 ℃ [分辨率] 5nm